Waste gas dry purifying device for CVD (chemical vapor deposition) on-line function film plating

Abstract

The invention relates to a waste gas dry purifying device for CVD (chemical vapor deposition) on-line function film plating. The device comprises an air source pipeline H, wherein the front end of the air source pipeline H is sequentially provided with a combustion chamber (2) and an ultrahigh temperature static dust remover (4), and the tail end of the pipeline is provided with an active carbon fiber purifier (8). The device is also characterized in that the pipeline is provided with a dry type deacidifying device (5) and a bag type dust remover (7). The device provided by the invention has the advantages that a dry purifying method is adopted, so the hidden hazard of water pollution caused by the existing wet purifying device is avoided, the running cost is reduced, and the service life of equipment is prolonged; the application prospect is wide, the combustible or non-combustible corrosive waste gas with complicated components and higher temperature can be purified and treated sufficiently and highly efficiently; and the film plating waste gas which has high temperature and acidity and contains dust, heavy metals and the like can also be treated, the purifying efficiency is high, and the purifying efficiency can reach more than 99.99%.

Description

technical field [0001] The invention relates to an industrial waste gas treatment system, in particular to a CVD on-line coating functional film waste gas dry purification device. Background technique [0002] In recent years, with the continuous development of urban industries, air pollution has become increasingly serious, and air quality has further deteriorated. Environmental problems have become global problems. A large amount of waste gas will be generated during the production process of CVD online coating functional film. The waste gas has complex components, high concentration, high temperature and strong corrosiveness, which is very harmful to the environment and human body. Purification treatment must be carried out in order to be discharged safely. This requires that the purification system of CVD on-line coating functional film waste gas has good stability, safety and high efficiency, low operating cost, can meet the requirements of continuous production and tre...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the shortcomings of the current CVD online coating waste gas purification device that cannot meet the requirements of simultaneous treatment of high temperature, acid, dust and fluorine-containing coating waste gas, and will produce water pollution during the purification process. A CVD online coating functional film waste gas dry purification device

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