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Array substrate and manufacturing method thereof as well as display device

A technology of array substrates and substrates, applied in semiconductor/solid-state device manufacturing, electrical components, transistors, etc., can solve problems such as channelbridge

Active Publication Date: 2013-04-03
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, although it can be improved by adjusting the thickness of PR halftone, it is generally necessary to re-adjust the exposure speed to confirm the stability of the exposure machine every time SDT Mask is performed. If the thickness of PR halftone is too thick, it is easy to cause channel bridge phenomenon.

Method used

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  • Array substrate and manufacturing method thereof as well as display device
  • Array substrate and manufacturing method thereof as well as display device
  • Array substrate and manufacturing method thereof as well as display device

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Embodiment Construction

[0112] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0113] Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by those skilled in the art to which the present invention belongs. "First", "second" and similar words used in the patent application specification and claims of the present invention do not indicate any order, quantity ...

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Abstract

The invention provides an array substrate and a manufacturing method thereof as well as a display device. A transparent conductive layer in a thin film transistor connection area is in direct contact with a grid lead wire, an ohm contact layer, source electrode and drain electrode lead-out wires and a substrate by etching a grid insulating layer and an active semiconductor layer of the thin film transistor connection area in a GOA (Global Outstanding Assessment) area, so that the condition that the transparent conductive layer of the thin film transistor connection area cracks can be reduced; and an insulating stopping layer is additionally arranged between the ohm contact layer and the active semiconductor layer in an area in which a thin film transistor in the GOA area is located, so that a channel of the thin film transistor is prevented from breaking.

Description

technical field [0001] The present invention relates to the technical field of liquid crystal display, and specifically relates to an array substrate, a manufacturing method thereof, and a display device. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD) has the characteristics of small size, low power consumption and no radiation, and occupies a dominant position in the current flat panel display market. For TFT-LCD, the structure of the array substrate and its manufacturing process determine the performance, yield and price of the product. [0003] Gate Driver on Array (GOA) is a high-tech design in the current TFT-LCD. It is a method to directly manufacture the gate driver circuit on the array substrate instead of the driver chip made by external silicon chips. kind of craft technology. [0004] Compared with the traditional COF process, GOA technology can not only save costs, but also save the Bonding (soldering) process in the Gate (g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02H01L29/786H01L21/77
Inventor 范昭奇刘同军段献学杨成绍邓立赟
Owner BOE TECH GRP CO LTD