Dual-gate VDMOS device
A double-gate and gate technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problem of operating frequency drop
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[0010] overview
[0011] Power devices such as buck converters typically require output devices with low resistance (for example, R ON ) and low gate capacitance, allowing increased operating frequency. Therefore, lower device capacitance allows higher operating and execution efficiencies to be achieved.
[0012] Accordingly, techniques for forming semiconductor devices, particularly VDMOS devices, that include double gates to reduce the gate-drain capacitance (C gd ). In one or more implementations, a semiconductor device includes a substrate having a first surface and a second surface. The substrate includes first and second bulk regions formed proximate to the first surface. Each body region includes a source region formed therein. The substrate further includes a drain region formed proximate to the second surface and an epitaxial region configured to act as a drift region between the drain region and the source region. In one embodiment, the epitaxial region inclu...
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