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Piezoelectric crystal plate resonant frequency measurement method

A piezoelectric chip and resonance frequency technology, which is applied in the field of piezoelectric chip resonance frequency measurement, can solve the problems of high cost and complicated detection process, and achieve the effect of high professionalism, few interference factors, and easy realization

Active Publication Date: 2013-04-24
CHINA AIRPLANT STRENGTH RES INST
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Problems solved by technology

At present, there is no special equipment for measuring the resonance frequency of piezoelectric wafers. The commonly used measuring instrument is a comprehensive impedance analyzer. This type of equipment is expensive and the detection process is complicated.

Method used

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  • Piezoelectric crystal plate resonant frequency measurement method
  • Piezoelectric crystal plate resonant frequency measurement method
  • Piezoelectric crystal plate resonant frequency measurement method

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[0031] The implementation process of the measuring method of the present invention will be described below by taking a piezoelectric wafer with an outer diameter of 8 mm and a thickness of 0.5 mm as an example. Such as figure 1 As shown in the wiring, the two poles of the circular piezoelectric wafer 1 are connected to the high-voltage pulse transmitter 2, and the probes of the oscilloscope 3 are connected to the two poles of the piezoelectric wafer 1.

[0032] Firstly measure the vibration resonant frequency of the circular piezoelectric wafer 1 in the thickness mode direction, and bring the parameters of the piezoelectric wafer (frequency constant in the thickness direction, thickness) into the formula (1), and obtain τ=0.25μs, at this time, the piezoelectric wafer will spontaneously Excited vibration, the waveform is as figure 2 shown. Calculate the time interval Δt between two adjacent peaks (the first peak and the second peak, the second peak and the third peak, the th...

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Abstract

The invention belongs to the field of aeronautical material performance test, and relates to a piezoelectric crystal plate resonant frequency measurement method. According to the method, a short-term high-voltage pulse method is adopted to excite a piezoelectric crystal plate, the piezoelectric crystal plate generates response vibration, a high voltage pulse is used as wideband excitation, the piezoelectric crystal plate responds selectively to vibration, and the vibrational frequency of the piezoelectric crystal plate is the resonant frequency of the piezoelectric crystal plate. According to the method, a pure time domain algorithm is adopted, the method is direct and simple and convenient, is small in interference factor, and high in accuracy. The piezoelectric crystal plate in a certain shape corresponds to more than one resonant frequency. For example, a round crystal plate has a high-frequency thickness mold vibration resonant frequency and a low-frequency radial mold resonant frequency. The method can totally measure the resonant frequency of mold vibration in different directions.

Description

technical field [0001] The invention belongs to the field of performance detection of aviation materials, and relates to a method for measuring the resonant frequency of a piezoelectric wafer. Background technique [0002] Piezoelectric chips are very important components in industrial production, medical treatment, and scientific research, such as medical CT, B-ultrasound, and non-destructive testing ultrasonic instruments, etc. The resonance frequency is one of its core parameters, and the resonance frequency determines the piezoelectric chip. application occasions. [0003] The existing method for detecting the resonant frequency of the piezoelectric wafer is mainly the spectrum analysis method. That is to use the method of frequency scanning to gradually sweep the piezoelectric wafer in a certain wide frequency range, draw the frequency spectrum curve according to the response amplitude of the piezoelectric wafer, and judge the resonant frequency of the piezoelectric wa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H11/06
Inventor 张昭肖迎春李闵行白玮杜振华郭佳王倩
Owner CHINA AIRPLANT STRENGTH RES INST
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