CNT mass and assembly, and layered product
A technology of aggregates and laminates, applied in the direction of nano-carbon, thin material processing, nanotechnology for materials and surface science, etc., can solve the problem of losing viscoelastic properties, and achieve the effect of excellent shock absorption
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[0155] An example of the above-mentioned CNT aggregate of the present invention will be described in detail below. In addition, the following Examples are an example, and this invention is not limited to them.
[0156] (Method for producing CNT aggregates)
[0157] The CNT assembly of the present embodiment of the present invention uses a 1 cm square silicon substrate with an oxide layer (600 nm), and is formed on the upper surface of the substrate 10 by high-frequency cathode sputtering (RF cathode sputtering) method and is made of aluminum oxide ( Al2O3) composed of a 30nm-thick co-catalyst layer. Next, a catalyst layer made of iron (Fe) with a thickness of 2 nm was formed on the alumina layer by RF cathode sputtering.
[0158] The substrate 10 on which the co-catalyst layer and the catalyst layer were formed was processed by RIE. At back pressure 5 x 10 -3 In the RIF apparatus of Pa, the substrate 10 on which the co-catalyst layer and the catalyst layer were formed was ...
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