PVD equipment adopting electromagnetic heating

Abstract

The invention is suitable for the field of material coating equipment and provides PVD equipment adopting the electromagnetic heating. The PVD equipment comprises a housing with a sealed cavity, wherein a sealing device in the housing divides the cavity into an upper cavity and a lower cavity; an evaporating boat used for accommodating target materials and evaporating the target materials to form a coating is arranged in the lower cavity; a feed opening allowing the access of materials to be coated and a discharge opening allowing the leaving of the materials to be coated are respectively formed in the two opposite sides of the housing; and an electromagnetic heating component used for heating the target materials is also arranged in the low cavity and sleeved on the circumference of the evaporating boat. According to the PVD equipment, the electromagnetic heating component used for heating is arranged in the sealed cavity and sleeved on the circumference of the evaporating boat to heat the target materials in the evaporating boat, so that an electromagnetic heating way is adopted to heat the target materials, which is high in heating speed, and accurate in temperature control, and accordingly, the production efficiency is improved. Besides, the formed coating is uniform and even, which meets the use requirement.

Description

technical field [0001] The invention belongs to the field of material coating equipment, in particular to a PVD equipment using electromagnetic heating. Background technique [0002] PVD is the abbreviation of Physical Vapor Deposition (Physical Vapor Deposition), which refers to the process of using physical processes to realize material transfer, and transfer the atoms or molecules of the target evaporation source to the surface of the substrate. Its function is to spray some particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance, etc.) on the matrix with lower performance, so that the matrix has better performance. The basic method of PVD is: under vacuum conditions, using low-voltage, high-current arc discharge technology, using gas discharge to evaporate the target material and ionize both the evaporated material and the gas, and use the acceleration of the electric field to make the evaporated material and gas Its rea...

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Problems solved by technology

[0003] In the prior art, the heating method generally uses electric heating coils to generate heat, and the heat is transferred to the barrel through conduction. In this way, only the inner heat is transferred to the barrel, and most of the outer heat is lost to the air. The loss of heat conduction causes the ambient temperature to rise. Another disadvantage of resistance wire heating is that the power density is low. In some occasions where a higher temperature is required, the target cannot be heated, and the target is excited to form coating particles.

The method of using electric heating coil to heat the target is inefficient, the thickness of the plated film is not uniform, and the surface of the film is rough

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