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Preparation method of vacuum coating

A vacuum coating and vacuum chamber technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of increased production cost, expensive coating oil, etc., to reduce working time, improve activity and Effects on adhesion, surface energy and performance enhancement

Inactive Publication Date: 2013-06-05
东莞星晖真空镀膜塑胶制品有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The price of coating oil is more expensive, which greatly increases the production cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] A preparation method for vacuum coating, comprising the steps of:

[0019] a. High-voltage ion cleaning and activation: the workpiece is put into the vacuum chamber and vacuumized. When the pressure of the vacuum chamber is 3Pa, stop vacuuming and start the high-voltage transformer. When the output voltage of the high-voltage transformer is 2500V and the current is 1A, the air is glow-discharged. Under the condition of being ionized into plasma, the workpiece is bombarded and cleaned by plasma, and the activation time is 1 minute, and the bombardment power is turned off;

[0020] b. Vacuum coating: vacuuming, the vacuum degree is 4×10 -2 At Pa, turn on the vacuum coating power supply, the evaporation voltage is 0.5V, the current is 10A, and the coating time is 25 seconds.

Embodiment 2

[0022] A preparation method for vacuum coating, comprising the steps of:

[0023] a. High-voltage ion cleaning and activation: put the workpiece into the vacuum chamber and pump the vacuum. When the pressure of the vacuum chamber is 20Pa, stop the vacuum pumping and start the high-voltage transformer. When the output voltage of the high-voltage transformer is 4000V and the current is 6A, the air is glow-discharged. Under the condition of being ionized into plasma, the workpiece is bombarded and cleaned by plasma, and the activation time is 5 minutes, and the bombardment power is turned off;

[0024] b. Vacuum coating: vacuuming, the vacuum degree is 5×10 -2 At Pa, turn on the vacuum coating power supply, the evaporation voltage is 5V, the current is 2000A, and the coating time is 45 seconds.

Embodiment 3

[0026] A preparation method for vacuum coating, comprising the steps of:

[0027] a. High-voltage ion cleaning and activation: put the workpiece into the vacuum chamber and pump the vacuum. When the pressure of the vacuum chamber is 10Pa, stop the vacuum pumping and start the high-voltage transformer. When the output voltage of the high-voltage transformer is 3000V and the current is 3A, the air is glow-discharged. Under the condition of being ionized into plasma, the workpiece is bombarded and cleaned by plasma, and the activation time is 2.5 minutes, and the bombardment power is turned off;

[0028] b. Vacuum coating: vacuuming, the vacuum degree is 4.5×10 -2 At Pa, turn on the vacuum coating power supply, the evaporation voltage is 2V, the current is 1000A, and the coating time is 35 seconds.

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Abstract

The invention relates to the technical field of material surface treatment, in particular to a preparation method of a vacuum coating. The preparation method comprises the following steps: a, high pressure ion washing and activating: a workpiece is placed in a vacuum chamber and vacuumized, when the pressure of the vacuum chamber is between 3Pa and 20Pa, vacuumization stops, a high-tension transformer is started, when the output voltage of the high-tension transformer is between 2500V and 4000V, and the current of the high-tension transformer is between 1A and 6A, the air is ionized to plasma under the condition of glow discharge, the workpiece is washed through a plasma body in a bombardment mode, the activating time is from 1 minute to 5 minutes, and a bombardment power source is turned off; and b, vacuum coating: the vacuum coating process is conducted on the workpiece after high pressure ion washing and activating in the vacuum chamber, and a metal coating is prepared on the surface. The prepared vacuum coating can damage an organization structure on the surface of nonpolar materials and improve surface energy and performance of products.

Description

technical field [0001] The invention relates to the technical field of material surface treatment, in particular to a preparation method of vacuum coating. Background technique [0002] Vacuum coating can deposit thin films of metals, semiconductors, insulators, alloys with different composition ratios, compounds and some organic polymers on the surfaces of metals, semiconductors, insulators, plastics, paper, fabrics, etc. It has a wide range of applications. [0003] At present, in order to obtain better adhesion for vacuum coating, a primer is often required before coating. Whether spraying or dipping is used for primer construction, coating oil is required. The price of coating oil is more expensive, which greatly increases the production cost. Especially non-polar materials have poor surface activity and extremely low surface adhesion, so it is necessary to apply coating oil to increase the surface activity of the material. Contents of the invention [0004] The inv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/14
Inventor 黄伟雄
Owner 东莞星晖真空镀膜塑胶制品有限公司
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