Wafer boat, wafer boat transfer device and wafer transfer system including same

Abstract

The invention provides a crystal boat, a crystal boat transfer device and a wafer transfer system containing the crystal boat and the crystal boat transfer device and belongs to the technical field of transmission transfer of semiconductor wafers. The crystal boat comprises a prying support rod and a support baffle rod, the prying support rod and the support baffle rod are fixed on the outer surface of a body and are mutually and basically parallel, the crystal boat transfer device is mostly of a prying rod shape, a prying hook is arranged on the end portion of the crystal boat transfer device, a gap is arranged between the prying support rod and the support baffle rod so as to enable the prying hook which is used for the crystal boat transfer device of the crystal boat to be conveniently acted on the prying support rod and the support baffle rod, the back face of the prying hook is acted on the support baffle rod and takes the support baffle rod as a support point, a channel groove face of the prying hook is acted on the prying support rod in a holding mode, so that slipping of the crystal boat in the process of transmission is prevented. Therefore, the wafer transfer device using the crystal boat and the crystal boat transfer device can conveniently lift and transfer the crystal boat which is loaded with the wafers, possibility of damage of the crystal boat and the wafers is small, and wafer transmission and transfer are convenient, and not easy to stain.

Description

technical field [0001] The invention belongs to the technical field of transport and transfer of semiconductor wafers, and relates to a wafer boat for loading wafers, a wafer boat transfer device for transferring the wafer boat, and a wafer transfer system including the wafer boat and the wafer boat transfer device. Background technique [0002] In the semiconductor chip manufacturing plant, the wafer is the basic carrier used to prepare the chip. As a semiconductor substrate, it requires many steps of processing (for example, oxidation diffusion). Between different processing steps, multiple wafers need to be processed. Transmission and transfer to carry out different processes in different equipment. [0003] Generally, during the transfer process, a device including a crystal boat is used to load the wafer. The crystal boat is generally made of quartz material, which has strong corrosion resistance and high temperature resistance. However, it is inconvenient to transfer ...

AI Technical Summary

Problems solved by technology

Therefore, in the operation process of oxidation diffusion, it is very important to control the loading and unloading of wafer boats in key links, because wafer boats are all long boats, which are extremely inconvenient to operate, and as long as there is one damage, the entire long boat will be scrapped, costing higher

At the same time, the cleanliness requirements during the entire oxidation diffusion process are very high, and any possible contamination will directly affect the electrical parameter performance of the device

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