Piezoresistive high-frequency dynamic soil stress sensor and fabricating method thereof

A stress sensor and high-frequency dynamic technology, which is applied in the field of sensors for soil stress measurement, can solve problems such as poor precision, low frequency response, and large sensor diameter, and achieve the effects of small size, high range, and simplified processing technology

Active Publication Date: 2013-06-26
昆山昆博智能感知产业技术研究院有限公司
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  • Abstract
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Problems solved by technology

[0004] The problem of the first aspect to be solved by the present invention is to overcome the defects of large diameter, low frequency response and poor precision of the sensor in th

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  • Piezoresistive high-frequency dynamic soil stress sensor and fabricating method thereof
  • Piezoresistive high-frequency dynamic soil stress sensor and fabricating method thereof
  • Piezoresistive high-frequency dynamic soil stress sensor and fabricating method thereof

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Embodiment Construction

[0023] The following is attached figure 1 For further description:

[0024] A high-frequency dynamic force sensor for measuring soil stress in the surrounding environment of underground hazardous waste is mainly composed of a sensor housing 7, a stress-sensitive component and a signal conditioning amplifier circuit 11. The sensor housing is made of high-quality Hitachi alloy, and the stress Sensitive components include the structure of the stress-sensitive components of the soil stress high-frequency dynamic sensor in the present invention. The structure is made of substrate 1—insulation isolation layer 2—boron-doped P-type microcrystalline silicon strain resistance 3—insulation protection layer 5; The component is electrostatically sealed to the fixed support step 18 at the front end of the sensor housing 7 through borosilicate glass 6. The stainless steel diaphragm 1 of the stress-sensitive component and the sensor housing 7 are fixed by laser welding. The gold electrode 4 o...

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Abstract

The invention discloses a piezoresistive high-frequency dynamic soil stress sensor and a fabricating method thereof. The sensor comprises a sensor shell (7), a stress sensitive component, a signal conditioning amplifying circuit (11) and a leading-out cable (13), and the stress sensitive component comprises a structure formed by a substrate (1), an insulating isolating layer (2), a strain resistor (3) and an insulating protection layer (5), and is connected to a clamped step (18) at the front end of the sensor shell (7) in a sealed manner through high borosilicate glass (6). The stress sensitive component integrates the strain resistor (3) and an adjusting resistor (19), so that the size is effectively reduced, machining process is simplified, manufacturing cost is lowered, mass production is easy to realize, and cost-performance ratio and market competitiveness of products are improved.

Description

technical field [0001] The invention relates to a piezoresistive high-frequency dynamic soil stress sensor, in particular to a sensor used for soil stress measurement in the surrounding environment of underground hazardous waste, and a sensor for soil stress measurement caused by chemical explosion shock waves and seismic waves. Background technique [0002] The rapid development of the nuclear industry has produced a large amount of nuclear waste, especially high-level nuclear waste. How to safely dispose of it has become an increasingly urgent environmental problem that needs to be solved. At present, the deep geological burial method is generally used for the disposal of high-level radioactive nuclear waste, and natural and artificial barrier systems are used to prevent the leakage and migration of nuclide, so as to achieve the purpose of safe disposal of high-level nuclear waste. Nuclear or chemical explosion shock waves and seismic waves may damage the protection system...

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Application Information

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IPC IPC(8): G01L1/18
Inventor 沈娇艳唐运海程新利王冰秦长发潘涛王文襄
Owner 昆山昆博智能感知产业技术研究院有限公司
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