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Fluorescence sensor

A fluorescent sensor and fluorescent technology, applied in the field of fluorescent sensors, can solve the problems that the fluorescent sensor 110 is not easy to obtain high detection sensitivity, etc.

Active Publication Date: 2015-07-29
TERUMO KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, it is not easy to obtain high detection sensitivity in the fluorescence sensor 110

Method used

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  • Fluorescence sensor
  • Fluorescence sensor
  • Fluorescence sensor

Examples

Experimental program
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Effect test

no. 1 Embodiment approach ＞

[0037] Hereinafter, the fluorescence sensor 10 according to the first embodiment of the present invention will be described.

[0038] Such as image 3 As shown, the needle-type fluorescence sensor 4 having the fluorescence sensor 10 constitutes the sensor system 1 together with the main body 2 and the receiver 3.

[0039] That is, the sensor system 1 includes a needle-type fluorescence sensor 4, a main body portion 2, and a receiver 3 that receives and stores signals from the main body portion 2. The signal transmission and reception between the main body 2 and the receiver 3 is performed wirelessly or wiredly.

[0040] The needle-type fluorescence sensor 4 includes a needle portion 7 having a needle tip portion 5 and an elongated needle body portion 6. The tip portion 5 includes a fluorescence sensor 10 as a main functional portion; it is integrated with the rear end portion of the needle body portion 6 化的 Connector Section 8. The needle tip portion 5, the needle body portion 6, an...

no. 2 Embodiment approach ＞

[0097] Next, the needle-type fluorescence sensor 4B having the fluorescence sensor 10B of the second embodiment of the present invention will be described. The fluorescence sensor 10B of this embodiment is similar to the fluorescence sensor 10 of the first embodiment, and therefore, the same components are assigned the same reference numerals, and the description is omitted.

[0098] Such as Picture 8 As shown, the fluorescence sensor 10B is formed on the side surface 24 (wall surface 45 of the through hole 46 of the frame-shaped substrate 40) of the concave portion 23 of the detection substrate portion 20B as the PD element 13A as the first photoelectric conversion element, and is also formed on the concave portion 23 A PD element 13B as a second photoelectric conversion element is formed on the bottom surface 22 (the upper surface of the wiring board 30B).

[0099] A silicon oxide layer 42B as a third protective layer for protecting the PD element 13B and a filter 41B are arrang...

no. 3 Embodiment approach ＞

[0117] Next, the needle-type fluorescence sensor 4D having the fluorescence sensor 10D of the third embodiment of the present invention will be described. The fluorescence sensor 10D of this modification example is similar to the fluorescence sensor 10 of the first embodiment and the like. Therefore, the same components are assigned the same reference numerals, and the description is omitted.

[0118] The detection substrate portion 20D of the fluorescence sensor 10D is integrally manufactured with a silicon wafer 20DW as a semiconductor substrate. That is, the concave portion 23D of the detection substrate portion 20D is, for example, a concave portion formed on the first main surface 21 of the silicon wafer 20DW by an etching method.

[0119] Next, use Figure 10A~Figure 10E , The manufacturing method of the fluorescence sensor 10D will be described. In addition, in Figure 10A~Figure 10E The middle is a partial cross-sectional view of the area of ​​one fluorescence sensor 10D...

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Abstract

A fluorescence sensor 10 includes a detection substrate section 20, on a first principal plane 21 of which a concave portion 23 having a bottom surface 22 parallel to the first principal plane 21 is present and, on a side surface 24 of the concave portion 23 of which a PD element 13 configured to receive fluorescent light F and output a detection signal is formed, an LED element 12 disposed on the bottom surface 22 of the concave portion 23 of the detection substrate section 20 and configured to generate excitation light E, and an indicator layer 16 disposed on an inside of the concave portion 23 on the LED element 12 and configured to generate the fluorescent light F corresponding to the excitation light E and an analyte amount.

Description

Technical field [0001] The embodiment of the present invention relates to a fluorescence sensor that measures the concentration of an analyte, and particularly relates to a fluorescence sensor as a micro fluorescence spectrophotometer manufactured using semiconductor manufacturing technology and MEMS technology. Background technique [0002] Various analytical devices have been developed for confirming the presence of the analyte in the liquid, that is, the substance to be measured, or measuring the concentration. For example, inject a certain volume of a transparent container with a fluorescent pigment whose properties change and produce fluorescence due to the presence of the analyte and a solution to be measured containing the analyte, and measure by irradiating excitation light E and measuring the fluorescence intensity from the fluorescent pigment Fluorescence spectrophotometers for analyte concentration are widely known. [0003] The compact fluorescence spectrophotometer ha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/64G01N21/78
CPCG01N21/77A61B5/1459A61B5/1455A61B5/14532G01N2021/7786G01N21/64A61B5/725
Inventor 太田亮清水悦朗
Owner TERUMO KK
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