Device and method for measuring performance of energy sensor of stepper

An energy sensor and measuring device technology, applied in the field of lithography machines, can solve the problems affecting the splitting ratio of the beam splitting prism, and cannot completely eliminate the influence of light source measurement accuracy, and achieve the effects of easy implementation, simple measurement method, and low cost

Active Publication Date: 2013-07-10
BEIJING GUOWANG OPTICAL TECH CO LTD
View PDF7 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the change of the polarization state of the light source will affect the splitting ratio of the beam splitting prism, so the light intensity ratio of the first measurement light and the second

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device and method for measuring performance of energy sensor of stepper
  • Device and method for measuring performance of energy sensor of stepper
  • Device and method for measuring performance of energy sensor of stepper

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0047] The present invention will be further described below with reference to the drawings and embodiments, but the protection scope of the present invention should not be limited by this.

[0048] See figure 1 , figure 1 It is the structure diagram of the performance measuring device of the energy sensor of the lithography machine of the present invention, and is also the best embodiment of the present invention. Such as figure 1 As shown, the performance measuring device of the energy sensor of the lithography machine of the present invention includes a light source 1, a polarizer 2, a beam splitter 3, a measuring light attenuator sheet 4, a rotation controller 8, an energy sensor to be measured 5, and a reference light attenuating sheet 6. With reference to the energy sensor 7, the multifunctional signal processing card 9 and the computer 10, the positional relationship of the above components is as follows:

[0049] The output beam direction of the light source 1 is the pol...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a device and method for measuring the performance of an energy sensor of a stepper. The device consists of a light source, a polarizer, a beam splitter, a measurement light attenuation piece, a rotary controller, the energy sensor to be measured, a reference light attenuation piece, a reference energy sensor, a multifunctional signal processing card and a computer. The device can be used for respectively carrying out high-accuracy measurement on the repeatability, the energy linearity and the frequency linearity of the energy sensor of the stepper; and the device and the method have the characteristics of being simple in measurement method, easy to implement and low in cost.

Description

technical field [0001] The invention relates to a lithography machine, in particular to a performance measurement device and a measurement method for an energy sensor of a lithography machine. Background technique [0002] A photolithography machine is a high-precision ultra-large-scale integrated circuit manufacturing device, and its lighting system has a sensor for measuring the energy of the exposure beam. The working principle of the energy sensor is to use the photoelectric sensor to convert the optical signal into an electrical signal, measure the intensity of the electrical signal, and then calculate the energy of the beam measured by the energy sensor. The energy sensor dynamically monitors the exposure beam energy during the exposure process. The dose control of the lithography machine is based on the measured value of the energy sensor for feedback control to achieve the exposure of the set dose. [0003] As one of the key components of exposure dose control, the...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G03F7/20G01J1/42
Inventor 谢承科陈明杨宝喜黄惠杰
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products