Device and method for measuring performance of energy sensor of stepper
An energy sensor and measuring device technology, applied in the field of lithography machines, can solve the problems affecting the splitting ratio of the beam splitting prism, and cannot completely eliminate the influence of light source measurement accuracy, and achieve the effects of easy implementation, simple measurement method, and low cost
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[0047] The present invention will be further described below with reference to the drawings and embodiments, but the protection scope of the present invention should not be limited by this.
[0048] See figure 1 , figure 1 It is the structure diagram of the performance measuring device of the energy sensor of the lithography machine of the present invention, and is also the best embodiment of the present invention. Such as figure 1 As shown, the performance measuring device of the energy sensor of the lithography machine of the present invention includes a light source 1, a polarizer 2, a beam splitter 3, a measuring light attenuator sheet 4, a rotation controller 8, an energy sensor to be measured 5, and a reference light attenuating sheet 6. With reference to the energy sensor 7, the multifunctional signal processing card 9 and the computer 10, the positional relationship of the above components is as follows:
[0049] The output beam direction of the light source 1 is the pol...
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