Forming method of flexible substrate film surface micro-structure

A flexible substrate and microstructure technology, applied in the direction of microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of PDMS fold buckling, etc., and achieve the effect of easy realization and simple operation

Active Publication Date: 2013-07-17
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

None of the above experimental methods can achieve selective wrinkle buckling on the PDMS surface.

Method used

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  • Forming method of flexible substrate film surface micro-structure
  • Forming method of flexible substrate film surface micro-structure
  • Forming method of flexible substrate film surface micro-structure

Examples

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Embodiment Construction

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0020] figure 1 It is a flow chart of the method for forming the surface microstructure of the flexible substrate film according to the embodiment of the present invention, figure 2 Curve patterns of different arc radii, curve spacing and shapes drawn for CAD, image 3 for the curvilinear pattern on the imaged quartz glass, Figure 4 It is the SEM scanning picture of the fold buckling of the flexible substrate aluminum film system, Figure 5 is the wrinkled and buckled morphology of the basement membrane observed under an ult...

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Abstract

The invention provides a forming method of a flexible substrate film surface micro-structure. The forming method includes plotting curve graphs and preparing a photolithography mask; carrying out silica glass photolithography by utilizing the photolithography mask; casting flexible substrate prepolymer on the graphical silica glass, and then solidifying to obtain and strip a graphical flexible substrate; and coating a metal film on the graphical flexible substrate. A curve structure is formed on the surface of a flexible substrate material, and then the film is coated on the substrate. Since temperature change produces thermal stress, the curve structure can be used for directing stress distribution inside the film; the curve structure with different curvatures, spaces and shapes can be designed to control regions and amplitudes of occurring of corrugation and buckling; and the forming method is simple to operate and easy to realize.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a method for forming a surface microstructure of a flexible substrate film. Background technique [0002] With the gradual popularization and application of flexible circuits and flexible devices, the design and optimization of flexible structures is particularly important. Flexible sensors, exciters and flexible electronic circuits are currently emerging as an important subject area. Utilizing the surface buckling of flexible substrate membrane structures to realize the function of flexible structures in service is a method that has been widely used. Ned Bowden et al. coated a gold film on the surface of a flexible substrate PDMS, and the temperature change generated during the coating process caused the film substrate system to spontaneously buckle and wrinkle. Subsequently, many scholars have studied the buckling of this thin film substrate syste...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 殷雅俊吴丹谢惠民
Owner TSINGHUA UNIV
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