Subaperture jointing laser interference on-line measuring method and subaperture jointing laser interference on-line measuring system based on intelligent digital control platform

Abstract

The invention belongs to the field of the modern optical measurement technology, and particularly relates to a subaperture jointing laser interference on-line measuring method and a subaperture jointing laser interference on-line measuring system based on an intelligent digital control platform. The subaperture jointing laser interference on-line measuring system comprises an industrial robot and control modules thereof, a driving module, a transient interferometer, a jointing and data analyzing system, a human-computer interaction interface and a workbench. Originally, the industrial robot performs polishing on optical elements through polishing components mounted on the wrist portion of the industrial robot. The transient interferometer is mounted on the wrist portion of the industrial robot through a flange according to the standard the same as a polishing head, so that precision measurement can be performed on each subaperture surface shape of a workpiece surface, and the jointing and data analyzing system is utilized to measure the surface shape of the overall workpiece surface. The subaperture jointing laser interference on-line measuring method and the subaperture jointing laser interference on-line measuring system based on the intelligent digital control platform are low in production cost, good in commonality and convenience, and can measure various kinds of surface shapes on line.

Description

Technical field [0001] The invention belongs to the field of modern optical measurement technology, and specifically relates to a computer-controlled (CNC)-based online measurement system and method for subaperture splicing laser transient interference, especially for large-aperture aspheric surfaces and flat, spherical, and complex surface optics In-situ online measurement during parts polishing. Background technique [0002] Subaperture Stitching Interferometry (SSI) is a comprehensive technology that combines optical interference, precision machinery, computer image processing, and mathematical analysis. The sub-aperture stitching interferometry method makes up for the shortcomings of the traditional full-aperture interferometry method with limited aperture and surface shape. The transient interferometer uses the pixelated four-phase mask technology to overcome the shortcomings of the traditional interferometer collecting and measuring data, and has a good anti-interference a...

AI Technical Summary

Problems solved by technology

However, the processing and measurement of this type of optical surface is much more difficult than that of plane and spherical surfaces, especially the measurement of large-aperture and high-steep aspheric surfaces has become the focus and difficulty of current research at home and abroad.

In addition, due to the large size and weight of large-diameter plane mirrors and spherical mirrors, the detection problem in processing has also become one of the bottlenecks restricting processing

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