Device and method for measuring microscopic topography of workpiece surface coated with cutting fluid

Abstract

A workpiece surface microtopography measurement device and measurement method covered with cutting fluid, belonging to the technical field of mechanical automation, including lasers, collimating lenses, laser couplers, lens I, lens II, lens III, Y-shaped optical fibers, and optical fiber couplers , spectrometer, long-pass filter, computer, X-axis motion table, Y-axis motion table, Z-axis motion table and motion controller, use laser to excite the cutting fluid on the surface of the workpiece to generate fluorescence, collect spectral signals through the computer, perform peak analysis, and obtain The thickness at the sampling point of the cutting fluid film is scanned through the interaction between the computer and the motion controller to scan the entire surface of the workpiece to complete the measurement of the microscopic topography of the entire workpiece surface covered with cutting fluid. In the state where the surface of the workpiece sample is covered with cutting fluid, the invention does not need to remove the workpiece for cleaning, and measures the shape of the workpiece surface on-site, avoiding the secondary clamping error caused by traditional off-line measurement, and covering the surface of the workpiece with cutting fluid for wet cutting Shape measurement provides new technical means.

Description

technical field [0001] The invention belongs to the technical field of mechanical automation, and in particular relates to a measuring device and a measuring method for the surface micro-topography of a workpiece coated with cutting fluid. Background technique [0002] In the process of high-speed micro-milling, the online in-situ measurement of workpiece surface topography directly affects the control of workpiece processing parameters and the final workpiece surface processing quality. Since the current processing method is mainly wet cutting, cutting fluid is required to participate in tool lubrication and cooling during workpiece processing, and the cutting fluid film will remain on the surface of the workpiece after processing, resulting in the in-situ on-line detection of the microscopic morphology of the workpiece surface. difficulty. Existing methods for removing the cutting fluid film include air blowing, alcohol scrubbing, ultrasonic cleaning, etc. The air blowing...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a measuring device and method for measuring the microscopic topography of the workpiece surface coated with cutting fluid, which solves the problems existing in the measurement of the microscopic topography of the workpiece surface covered with cutting fluid in the existing wet cutting. The residual cutting fluid on the surface of the workpiece is processed, the cutting fluid film is excited by laser to generate fluorescence, and the microscopic topography of the workpiece surface is measured by using optical fiber confocal technology

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