Array substrate, its manufacturing method and display device

Abstract

An array substrate, a manufacturing method therefor and a display device thereof. The method includes: forming a gate metal layer on a substrate (31), forming patterns including gates (32) and gate lines by patterning processes; successively forming an insulating layer (38), a semiconductor material layer and a source / drain metal layer on the substrate (31) with patterns of gates (32) and gate lines formed thereon, forming patterns including a semiconductor layer (33a), source / drain electrodes (34) and data lines (35) by the patterning processes, wherein the patterns of the source / drain electrodes (34) are consistent with the patterns of the semiconductor layer (33a); forming a first transparent conductive layer on the substrate (31) with the semiconductor layer (33a), the source / drain electrodes (34) and the data lines (35) formed thereon, forming the patterns of the first transparent electrodes (36) by the patterning processes, and forming gaps (39) on the patterns of the source / drain electrodes (34) to form the patterns of sources (341) and drains (342).

Description

technical field [0001] The invention relates to the technical field of liquid crystal display, in particular to an array substrate, a manufacturing method thereof and a display device. Background technique [0002] The liquid crystal panel of the thin film transistor liquid crystal display device includes figure 1 The array substrate shown, wherein, the structure of the array substrate is as figure 1 As shown, it includes a gate line 11 and a data line 12 which are perpendicular to each other and electrically insulated, and a pixel area is defined between the gate line 11 and the data line 12, and a thin film transistor (such as figure 1 shown in the dotted circle) and the pixel electrode 13. The gate 14 of the thin film transistor is electrically connected to the gate line 11 , the source (not shown in the figure) is connected to the data line 12 , and the drain (not shown in the figure) is electrically connected to the pixel electrode 13 . [0003] The prior art usually...

AI Technical Summary

Problems solved by technology

[0006] Embodiments of the present invention provide an array substrate, its manufacturing method, and a display device, which solve the problems caused by the use of semi-transparent masks or grayscale masks in order to reduce the number of common masks used in the manufacture of array substrates in the prior art. The problem of increased difficulty in process control

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