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Fluorescent x-ray analysis device and fluorescent x-ray analysis method

An analysis device and analysis method technology, which is applied in the field of fluorescent X-ray analysis device and fluorescent X-ray analysis, can solve the problems of poor time efficiency and achieve low cost and improve reliability

Active Publication Date: 2017-04-12
HITACHI HIGH TECH SCI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this visual judgment includes a difference in judgment between operators, and it is necessary to confirm the difference in detection intensity in order to make a judgment. Therefore, it is necessary to wait for a series of measurements to be completed before performing the measurement again, which has a problem of very poor time efficiency.

Method used

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  • Fluorescent x-ray analysis device and fluorescent x-ray analysis method
  • Fluorescent x-ray analysis device and fluorescent x-ray analysis method
  • Fluorescent x-ray analysis device and fluorescent x-ray analysis method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0035] First, the configuration of the fluorescent X-ray analyzer 200 will be described.

[0036] image 3 It is a schematic configuration diagram of the fluorescent X-ray analyzer 200 according to Embodiment 1 of the present invention.

[0037] exist image 3 Among them, the fluorescent X-ray analysis device 200 has: an input unit 201, which inputs data; a calculation unit 202 as a calculation unit, which performs various calculations; an X-ray generation unit 203, which irradiates an X-ray 204 once to an object 205 to be measured; A detection unit 207 that detects secondary X-rays (fluorescent X-rays) 206 from the object to be measured 205; a display unit 208 that displays various data; an imaging unit 209 that photographs the measurement site of the object to be measured 205; and an illumination 210 , which illuminates so that the object 205 to be measured can be observed by the imaging unit 209 .

[0038] The input unit 201 is a portion for a measurer to input measureme...

Embodiment approach 2

[0070] Next, Embodiment 2 will be described.

[0071] Figure 5 It is a schematic configuration diagram of a fluorescent X-ray analyzer 200 according to Embodiment 2 of the present invention. The configuration is the same as that of the first embodiment except for the addition of the database 312 and the display unit 314 and the input unit 315 in the remote operation terminal 313 .

[0072] Information such as the measurement date and time, the analysis result, the measurer, and the attached file related to the measurement result is set as the measurement information.

[0073] In Embodiment 1, a database 312 is added in order to associate the identification information with the measurement information for browsing / editing by the administrator. The product number, name, or character string is input as identification information from the input unit 301, and is stored in the database 312 when the measurement is completed. The administrator can browse the contents of the databa...

Embodiment approach 3

[0081] Next, Embodiment 3 of the fluorescent X-ray analyzer 400 will be described.

[0082] Figure 7 is a schematic configuration diagram of the fluorescent X-ray analyzer 400 . The configuration is the same as that of Embodiment 1 except that a sample stage 412 is added.

[0083] The sample stage 412, which is a component for placing the object to be measured 405 and moving the measurement site, can be driven in the three-axis directions of XYZ by an actuator using an electric motor. The sample stage 412 is capable of arranging a plurality of objects to be measured and performing automatic measurement on each of them, enabling automatic measurement of a plurality of samples.

[0084] Next, the operation of the measurement unit 400 will be described. Figure 8 The flow of the measurement work is shown by a flowchart.

[0085] The operation of the measurement unit 400 is the same as that of the first embodiment except for the following points.

[0086] The range S316 indi...

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Abstract

A fluorescent X-ray analysis device and a fluorescent X-ray analysis method. An object of the present invention is to provide a function of automatically detecting movement of a sample that has moved during measurement based on a change in the image of the sample. As a solution, it has an imaging unit that captures a sample image of the object to be measured, and has the function of temporarily saving the sample image at the start of the measurement and comparing it with the latest sample image during or after the measurement. It also has the following functions: If the result of the image processing is that the difference is greater than the threshold value, a warning is issued to the measurer through the display unit, buzzer sound, signal tower, or notification to the remote management terminal.

Description

technical field [0001] The present invention relates to a fluorescent X-ray analysis device and an analysis method thereof, and particularly relates to position correction of a measurement site of an object to be measured. Background technique [0002] In recent years, countries are perfecting laws to regulate the concentration of environmentally hazardous substances in the components of electrical / electronic equipment, and component manufacturers need to be able to conduct elemental analysis in a non-destructive manner during product inspection and product development. means (for example, refer to Patent Document 1). [0003] In particular, the demand for elemental analysis of cadmium, lead, tribute, hexavalent chromium, and bromine has increased due to the RoHS (Restriction of Hazardous Substances) regulations in Europe. Fluorescence is widely used in order to quickly detect environmentally hazardous substances. X-ray analysis. [0004] Fluorescent X-ray analysis has hig...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/223
CPCG01N23/04G01N23/223G01N2223/076G01N2223/1016G01N2223/302G01N2223/323G01N2223/40
Inventor 佐久田昌博
Owner HITACHI HIGH TECH SCI CORP