Unlock instant, AI-driven research and patent intelligence for your innovation.

Movable lens adjustment device and adjustable optical system using the same

A lens adjustment and optical system technology, applied in the direction of optics, optical components, photo-plate-making process exposure devices, etc., can solve problems such as movement, low adjustment accuracy, unsuitable adjustment accuracy movable lenses, etc., to improve adjustment accuracy, Eliminates the effect of channeling

Active Publication Date: 2016-03-30
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, during the moving process of the movable lens, there will be a movement phenomenon, resulting in low adjustment accuracy, so it is not suitable for movable lenses with high adjustment accuracy.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Movable lens adjustment device and adjustable optical system using the same
  • Movable lens adjustment device and adjustable optical system using the same
  • Movable lens adjustment device and adjustable optical system using the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0025] figure 1 It is a schematic diagram of an adjustable optical system in a preferred embodiment of the present invention. figure 2 for figure 1 Schematic diagram of the middle tube. image 3 for figure 1 Schematic diagram of the connection between the movable lens and the supporting shrapnel. Please refer to Figure 1 ~ Figure 3 . In this embodiment, the adjustable optical system 1 includes a lens barrel 10 , a movable lens 11 , a supporting spring 12 , a first fixing member 13 , a second fixing member 14 , a preload spring 15 and a movable lens adjusting device 16 . The movable lens 11 is movably disposed on the lens barrel 10 through the supporting elastic piece 12 . The first fixing part 13 and the second fixing part...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a movable lens adjusting device and an adjustable optical system using the same, which are used for adjusting the position of the movable lens relative to the lens barrel. The movable mirror adjustment device includes a driving element, a lever, a first double ball bearing and a second double ball bearing. The lever includes a body and a support seat, the support seat is arranged on the lens barrel, the body is rotatably arranged on the support seat, and the body has a first arm and a second arm. The first double ball bearing connects the drive element with the first support arm. The second double ball bearing connects the second arm with the movable lens. The invention uses two double ball bearing structures to avoid slippage between the first arm and the driving element, as well as the second arm and the movable mirror during the rotation of the lever.

Description

technical field [0001] The invention relates to a photolithography machine equipment, in particular to a movable lens adjustment device and an adjustable optical system using the same. Background technique [0002] In the lithography projection objective lens, due to the manufacturing and assembly errors of the lens, the imaging quality of the objective lens deteriorates. In order to solve this problem, movable lenses are generally used to compensate for the manufacturing and assembly errors of the lenses. [0003] In the US patent application publication with publication number US20080204905, the movable lens is supported by three evenly distributed flexible blocks, and the movement of the movable lens is realized through elastic deformation of the flexible blocks. In the Chinese patent application publication with the application number CN200810204974, the movable lens is supported by three evenly distributed lever mechanisms, and the movement of the movable lens is reali...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G02B7/02G02B7/00
Inventor 彭云平马很很王洪尊
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD