Dynamic pressure floating off polishing disc dynamic pressure floating off position precision adjustment mechanism

Abstract

Provided is an precision adjustment mechanism for a dynamic-pressure floating position of a dynamic-pressure floating polishing disc. The polishing disc is connected with the lower end of a spindle. The precision adjustment mechanism comprises a machine frame, a micro-moving lifter, an L press block, a limiting shaft sleeve and a spring, wherein a motor shaft penetrates a through hole of the L press block, the L press block abuts against the upper portion of a thrust ball bearing, the thrust ball bearing is sleeved outside the motor shaft, and the lower portion of the thrust ball bearing is installed on an inner wall of the limiting shaft sleeve. The lower portion of the motor shaft is located in the limiting shaft sleeve, the motor shaft is in vertical movable connection with the limiting shaft sleeve through a key, the lower portion of the limiting shaft sleeve is located in a spline shaft, and the limiting shaft sleeve is in vertical movable connection with the spline shaft through a key. The upper end of the spindle is installed in the spline shaft, the spring is sleeved in the spline shaft, the upper end of the spring abuts against the lower end of the limiting shaft sleeve, and the lower end of the spring abuts against the spindle. The L press block is connected with the action end of the micro-moving lifter, and the micro-moving lifter and the spindle shaft are installed on the machine frame. The precision adjustment mechanism effectively avoids influence of cyclical variation of the floating position and improves the polishing precision.

Description

technical field [0001] The invention relates to the field of grinding devices, in particular to a dynamic pressure floating polishing disc. Background technique [0002] Dynamic pressure float off polishing is a kind of non-contact polishing. The working principle of the plane non-contact polishing device is: when the disk with several inclined planes along the circumferential direction rotates in the liquid, the liquid wedge generates hydrodynamic pressure (the working principle of the dynamic pressure thrust bearing), so that the workpiece in the retaining ring Floating away from the surface of the disc, the workpiece is polished by the powder particles in the floating gap. There is no frictional heat and tool wear during processing, and the standard plane will not change, so precise workpiece surfaces can be obtained repeatedly. This method is mainly used for polishing semiconductor substrates, various functional ceramic materials and optical glass flat crystals, and ca...

AI Technical Summary

Problems solved by technology

If the hydrodynamic pressure continues to act, the workpiece will float up and down (vibration) at a certain frequency, that is to say, the floating position of the workpiece relative to the main grinding disc will continue to change, and even a certain instability will appear, which will affect the workpiece The machining accuracy of the surface will be adversely affected, and the polishing efficiency will also be reduced.

If the workpiece is rigidly connected to the adjustment mechanism, the floating will have a rigid impact on the connection, thereby affecting the service life of the mechanism

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