Method for measuring three-dimensional acceleration through static supporting type optical detecting method

Abstract

The invention discloses a method for measuring three-dimensional acceleration through the static supporting type optical detecting method. A liquid substance is used as a sensitive quality body, a regular hexahedron structure is adopted, the optical detecting method is used for detecting liquid shape and position changes, and electrostatic force is used for balancing inertia force to realize three-dimensional acceleration measuring. According to the method for measuring the three-dimensional acceleration, the liquid is used as the sensitive quality body so that normal work can be recovered after large impact or high overload; due to the fact that the static supporting technology is adopted and the electrostatic force and the inertia force are in linear relationship, method has the advantages of being high in sensitivity, wide in measuring range and the like.

Description

technical field

[0001] The invention belongs to the technical field of high-precision inertial measurement, and in particular relates to a method for measuring three-dimensional acceleration by an electrostatic support type optical detection method. Background technique

[0002] The measurement of acceleration is to convert the physical signal of acceleration into a measurable electrical signal. For example, the measured acceleration can be converted into the capacitance change of the capacitor through three methods: variable area, variable dielectric constant, and variable gap. The traditional capacitive accelerometer-based measurement method adopts a differential variable gap structure, and the acceleration is measured by measuring the capacitance change between the two electrodes caused by the gap change between the sensitive electrode and the fixed electrode. Since the solid pole plate is used as the sensitive electrode, when the solid pole plate is fixed to the shell, ...

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