A contact type three-dimensional scanning measuring head

Abstract

The invention relates to a contact-type three-dimensional scanning measuring head measuring device and belongs to the field of precision measurement. The measuring device is suitable for micrometric displacement measuring and three-dimensional microsize measuring. The measuring device comprises a mechanical measuring head part and a grating signal processing part. An elastic parallelogram structure composed of a parallel spring piece structure and four double-hinge rods in the y direction, the x direction and the z direction is arranged in the mechanical measuring head part. When the scanning measuring head measuring device is used, measuring force and displacement in any direction are decomposed to measuring force and displacement in plane horizontal motion and motion perpendicular to the plane direction, compared with displacement which is directly decomposed in three directions, the mechanical structure of a measuring head is greatly simplified, a three-dimensional Abbe arm of the measuring head is reduced, an error transmission chain is shortened, in addition, motion weight and measuring force in the three directions are equal, deflecting force is even, dynamic property is identical, part machining is easy, cost is low, and mounting and debugging are easy.

Description

Technical field: [0001] The invention relates to the field of precision measuring equipment, in particular to a three-dimensional contact scanning measuring head. Background technique: [0002] The measuring head is a key component of measuring equipment such as coordinate measuring machines and gear measuring centers, and its performance directly affects the measurement accuracy and work efficiency of the measuring equipment. The scanning probe is also called the linear probe. Unlike the trigger probe, the contact scanning probe overcomes anisotropy, pre-travel error and sampling by changing the probe itself and the supporting measurement system. Point limitation and other disadvantages, and because the probe keeps in contact with the surface of the workpiece, the probe can continuously read the coordinates of the contact point, improving the measurement efficiency. When the stylus of the probe touches the workpiece, it not only sends out an aiming signal, but also gives t...

AI Technical Summary

Problems solved by technology

[0003] However, the traditional contact scanning head cannot meet the following technical difficulties during the measurement process: 1; the measuring head has a constant measuring force in each measuring direction, and the measuring force can be adjusted. The measuring head needs an appropriate measuring force during the measuring process to ensure It can closely follow the shape of the measured workpiece surface without causing damage to the measured object. Otherwise, if the measurement force is too large, the surface of the workpiece will be scratched, and if the measurement force is too small, it will not be possible to ensure real-time contact between the probe and the surface of the workpiece; 2. Any direction The measurement sensitivity should be consistent; 3. The dynamic characteristics in any direction should be consistent

Such as Renishaw REVO produced by RENISHAW TM The contact scanning probe uses a laser system to accurately obtain the exact position of the probe tip, which has the problem of low z-direction sensitivity and is expensive

The scanning probe devices currently produced by German Zeiss, German Leitz, Swiss Mecartex and domestic Harbin Measuring Tools and Cutting Tools Group Co., Ltd. mostly use inductive sensors, which are not suitable for fast dynamic occasions due to their low frequency response, complex conversion circuits and electronics. Disadvantages such as errors

ENISHAW company's SP80 nested structure has different kinematic qualities of its kinematic connection components relative to all coordinate directions, so the dynamic characteristics in all directions are inconsistent, the deflection force is uneven, and the installation and debugging of the probe are difficult to manufacture.

The early three-dimensional inductive sensor head of Zeiss company used three layers of reed guide rails superimposed on each other, which had a large axial dimension and was sensitive to Abbe error.

The new generation of VAST intelligent linear probe system has a large Abbe error, and the gravity balance mechanism has disadvantages such as damping, and the price is expensive

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