Semiconductor interconnect structure

Abstract

The present disclosure provides an interconnect structure for a semiconductor device. The interconnect structure includes a first metal layer that contains a first metal line. The interconnect structure includes a dielectric layer located over the first metal layer. The dielectric layer contains a first sub-via electrically coupled to the first metal line and a second sub-via electrically coupled to the first sub-via. The second sub-via is different from the first sub-via. The interconnect structure includes a second metal layer located over the dielectric layer. The second metal layer contains a second metal line electrically coupled to the second sub-via. No other metal layer is located between the first metal layer and the second metal layer.

Description

technical field [0001] The present invention generally relates to the field of semiconductor technology, and more particularly relates to semiconductor interconnection structures. Background technique [0002] The semiconductor integrated circuit (IC) industry has experienced rapid growth. Technological advances in IC materials and design have produced multiple IC generations, where each generation has smaller and more complex circuits than the previous generation. These advances, however, have increased the complexity of handling and manufacturing ICs, requiring similar developments in IC processing and manufacturing for these advances to be realized. In the course of IC evolution, functional density (ie, the number of interconnected devices per unit chip area) generally increases, while geometry size (ie, the smallest component that can be made using a fabrication process) decreases. [0003] As the semiconductor industry progresses to nanotechnology process nodes in pur...

AI Technical Summary

Problems solved by technology

[0004] Thus, while existing multilayer devices and methods of making multilayer devices are generally suitable for their intended purposes, they are not entirely satisfactory in all respects

Images