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Device and method for measuring microstructure through angular spectrum scanning illumination fluorescent follow-up pinhole detection

A technology of follow-up pinholes and measurement methods, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of complex reflection, unable to illuminate, and unable to measure, so as to improve the measurement speed and solve the problem of detection signal strength attenuation and background The effect of noise enhancement

Inactive Publication Date: 2013-11-27
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the above problems, the present invention designs a microstructure measurement device and method for angular spectrum scanning illumination fluorescence follow-up pinhole detection; the device and method can not only avoid some areas that cannot be illuminated or complicated The problem of reflection can effectively solve the problem that the detection signal intensity attenuation and the background noise increase cause the measurement accuracy to decrease or even fail to measure, and it can realize that there is a corresponding fluorescent pinhole in front of each CCD camera pixel, so that the fluorescence can follow There is no need for precise alignment between pinholes and CCD camera pixels

Method used

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  • Device and method for measuring microstructure through angular spectrum scanning illumination fluorescent follow-up pinhole detection
  • Device and method for measuring microstructure through angular spectrum scanning illumination fluorescent follow-up pinhole detection
  • Device and method for measuring microstructure through angular spectrum scanning illumination fluorescent follow-up pinhole detection

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specific Embodiment 1

[0027] The structural diagram of the microstructure measurement device for angular spectrum scanning illumination fluorescence follow-up pinhole detection in this embodiment is as follows figure 1 As shown, the device includes a laser 1, a first scanning galvanometer 2, a second scanning galvanometer 3, a scanning lens 4, a first diaphragm 5, a first imaging lens 6, a beam splitter 7, a second diaphragm 8, a display Micro-objective lens 9, scanning stage 10, tube lens 11, fluorescent follow-up pinhole 12, second imaging lens 13, narrow-band filter 14 and CCD camera 15; After being reflected by the second scanning galvanometer 3, it passes through the scanning lens 4, the first aperture 5, the first imaging lens 6, the beam splitter 7, the second aperture 8, and the microscopic objective lens 9 in order to irradiate onto the scanning stage 10. The surface of the sample with the microstructure moving in the axial direction constitutes the angular spectrum scanning illumination l...

specific Embodiment 2

[0037] The difference between this embodiment and the specific embodiment 1 is that in the step a, the first scanning vibrating mirror 2 is adjacent to two stepping rotation positions; the second scanning vibrating mirror 3 is adjacent to two stepping rotation positions; At least one of the two adjacent step-translation positions of the stage 10 is different. The setting of different angles between the step rotation positions or the step translation position spacing can achieve local fine adjustment.

[0038] In the above embodiment, the mentioned step d is specifically:

[0039] The light field distribution of the plane where the fluorescent follower pinhole 12 is located is:

[0040] U ( x ′ , y ′ ) = [ U ( x , y ) × ...

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Abstract

The invention provides a device and method for measuring microstructures through angular spectrum scanning illumination fluorescent follow-up pinhole detection, belongs to the field of ultra-precision three-dimensional microstructure surface morphology measurement and mainly relates to a device and method for measuring microstructures based on angular spectrum scanning illumination fluorescent follow-up pinhole detection. The device is provided with an angular spectrum scanning illumination light path and a fluorescent follow-up pinhole detection light path, and meanwhile a method for measuring three-dimensional microstructure samples is provided. The device and method not only can avoid the problem that some areas can not be illuminated or complex reflection occurs to the areas, wherein the problem is caused by the existing light beam converging illumination technology; the device and method effectively solve the problems that due to the attenuation of detection signal strength and enhancing of background noise, the measurement precision is lowered and even the measurement can not be performed. Moreover, the device and method can achieve that a corresponding fluorescent pinhole exists before every CCD camera pixel, and thus precision adjustment does not need to be performed between the fluorescent follow-up pinholes and the CCD camera pixels.

Description

technical field [0001] The microstructure measurement device and method for angle-spectrum scanning illumination fluorescence follow-up pinhole detection belong to the field of ultra-precise three-dimensional microstructure surface topography measurement, and mainly relate to a microstructure measurement device and method based on angle-spectrum scanning illumination fluorescence follow-up pinhole detection . Background technique [0002] The processing and application of microstructures are mainly reflected in three aspects: microelectronics technology, microsystem technology and micro-optical technology, such as typical applications such as computer chips, biochips and microlens arrays. The common feature of the above-mentioned technologies is that they have a three-dimensional structure, and the size of the functional structure is on the order of micron, submicron or nanometer. development of related industries. With the rapid development of micromachining technology, i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 刘俭谭久彬王宇航
Owner HARBIN INST OF TECH