Preparation method for back face local contact structure of crystalline silicon solar cell
A local contact and solar cell technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of high industrialization cost, high equipment investment, high precision requirements, etc., to reduce production investment, ensure stability, and simple operation Effect
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[0040] Such as figure 1 The structure of a typical back-passivated crystalline silicon solar cell is shown. The upper surface of the cell is a crystalline silicon substrate with a textured surface and an anti-reflection film 1 and a metal electrode 2 on the upper surface. A double layer of silicon dioxide and silicon nitride is deposited on the back surface. passivation film 3 and aluminum back field 4 .
[0041] 1. Design the mask pattern according to the required rear passivation structure of crystalline silicon solar cells. In this example, the mask plate style is selected from the attached figure 2The linear mask composed of mask strips is shown; the parameters are designed as the width of the mask strip is 0.3mm, the width of the contact point with the silicon wafer is 0.1mm, the line spacing is 2mm, and the thickness of the mask strip is 1.5mm. The contact area of the silicon wafer (that is, the uncoated passivation area) accounts for 5% of the total area of the s...
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