Integrated device used for analyzing trace atmosphere contained in micro volume component

Abstract

The invention relates to an integrated device used for analyzing trace atmosphere contained in a micro volume component. The integrated device used for analyzing the trace atmosphere contained in the micro volume component adopts an integrated structural design, and a sampling room (1) is connected with an ion source (2) of a mass spectrometry instrument by virtue of a fixed flange interface to form an overall structure, so that gas released by the component after being broken is directly introduced into an ionization box of the ion source to be analyzed, and analysis sensitivity is improved. The integrated device for analyzing the trace atmosphere contained in the micro volume component comprises two parts, namely the sampling room and a mass spectrum ion source; the sampling room is divided into three parts, namely a transmission mechanism, an upper pressing base and a lower pressing base; the transmission mechanism is sealed and connected with the upper pressing base by virtue of the lower pressing base; a sample is placed in a rectangular groove of a pushing block in the transmission block; the transmission mechanism adopts a screw structure, a ball head is arranged at one end of a transmission screw, and the ball head is riveted in a spherical groove in the bottom of the pushing block; when the transmission screw rotates, the pushing block can be driven to do linear motion by virtue of connection of the ball head.

Description

technical field [0001] The invention relates to the analysis of gas components in tiny components, adopts the integrated structure design of the sample chamber and the mass spectrometer, reduces the gas expansion volume after sampling, and at the same time makes the analyzed gas directly enter the ion source of the quadrupole mass spectrometer for ionization, and then is ionized Analyze it. Background technique [0002] The type and content of gas components contained in electronic components have a very important effect on the performance and life of the device. Using mass spectrometry to analyze it is a common technical means. Generally speaking, for larger components, a hole without penetration will be made on the glass or metal shell, and the hole will be connected to the analysis system through a pipeline. When the vacuum degree in the vacuum system reaches a certain level, the hole will be broken down. The gas enters the analysis system for analysis. For conventiona...

AI Technical Summary

Problems solved by technology

But for tiny devices with microliters or even less than microliters, on the one hand, because the volume of the components is too small, it is difficult to open holes, needles or magnetron hammers, and on the other hand, due to the total The amount of gas is very small, it is difficult to bear the consumption of gas during the analysis process, and the volume of the gas expands after breaking, resulting in a sharp drop in air pressure, and the pressure of impurity gases in it decreases accordingly, which poses a challenge to the analytical sensitivity of the mass spectrometer

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