Intelligent test system and test method for improving probe card test abnormality

Abstract

The invention discloses an intelligent test system for improving probe card test abnormality. The intelligent test system is applied to a test of chip parameters and comprises a testing machine stand provided with a probe card. The intelligent test system further comprises a target parameter normal value setting device, a judging device, a test result output device and a test control device. The invention further discloses a test method for improving the probe card test abnormality. The method further includes the following steps of target parameter normal value setting, testing and controlling, judging, test result outputting and repeated testing and controlling. According to the intelligent test system and the test method for improving the probe card test abnormality, through repeated probing, testing and parameter range judging, consumption of the probe card is effectively reduced, the contact capacity of the probe card is guaranteed, wire rod aging of the probe card is controlled, therefore, the problem that due to the probe card test abnormality, chip parameter test results are abnormal is improved, and the qualified rate of chip testing is improved.

Description

technical field [0001] The invention relates to the field of microelectronics technology, in particular to the field of wafer chip parameter testing, in particular to an intelligent testing system and a testing method for improving probe card testing abnormalities. Background technique [0002] At present, all test parameters are completed with a single needle test, and the probe card as a test bridge plays a key role in both test accuracy and test stability, but the cost price of a probe card is different. Fei, excessive use will cause consumption of the probe card, the length of the probe will be shortened, the diameter will become larger, the contact ability will be reduced, and the wire will be aged. At this time, the test chip parameter pass rate (Pass Rate) will be greatly reduced , especially when testing sensitive parameters, it will cause certain instability. [0003] Chinese patent (publication number: CN101452010) discloses a probe card for chip testing, includin...

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Problems solved by technology

[0006] In view of the above existing problems, the present invention discloses an intelligent test system and a test method for improving probe card test abnormalities, so as to overcome the consumption of the probe card in the prior art, the length of the probe is shortened, and the diameter is enlarged. Reduced contact ability, and the problem of wire aging

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