Multilayer Chip Structure Oxygen Sensor
A multi-layer chip, oxygen sensor technology, applied in the field of oxygen sensors, can solve problems such as cracking, and achieve the effects of preventing cracking, improving mechanical property matching, and improving performance
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[0016] The technical scheme of the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the examples given are not intended to limit the present invention.
[0017] like figure 1 As shown, the oxygen sensor with a multilayer chip structure includes a protective layer 1, a zirconia sensitive layer 2, a first porous transition layer 3, a reference gas channel layer 4, a second porous transition layer 5, The heating layer 6, wherein the protective layer 1 can be used to protect the entire oxygen sensor, can increase the service life of the oxygen sensor, figure 2 It is a schematic diagram of the combined structure. The upper surface of the zirconia sensitive layer is provided with an external electrode 21, the lower surface is provided with an internal electrode (not shown in the figure), and a regulatin...
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