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Silicon carbide coating solution used on graphite surface and spraying technology thereof

A silicon carbide coating and solution technology, which is applied in the field of silicon carbide coating solution and its spraying process, can solve the problems such as the inability to buy a CVD coating reaction furnace, and achieve the effects of improving the service life of components, prolonging the service life and reducing corrosion.

Inactive Publication Date: 2014-01-01
SHANGHAI HENGGU NEW MATERIAL SCI & TECHCO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the United States restricts the export of high technology to China, it is currently impossible to buy CVD coating reactors in China

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] The spraying process of the silicon carbide coating solution that is used for graphite surface among the present invention, it adopts following steps:

[0020] a. Take a large-diameter sprayer, put the above solution into it, and spray the surface of the graphite part;

[0021] b. Drying after spraying, the drying temperature is 180°C;

[0022] c. Then spray on the surface of graphite parts;

[0023] d. Drying after spraying, the drying temperature is 180°C;

[0024] e. Put the graphite parts that have been sprayed twice into a vacuum furnace for roasting, heat up and roast for 3 hours to 1400°C, and roast at this temperature for 1 hour, and finally cool down for 6 hours to 300°C to start the furnace.

Embodiment 2

[0026] The spraying process of the silicon carbide coating solution that is used for graphite surface among the present invention, it adopts following steps:

[0027] a. Take a large-diameter sprayer, put the above solution into it, and spray the surface of the graphite part;

[0028] b. Drying after spraying, the drying temperature is 220°C;

[0029] c. Then spray on the surface of graphite parts;

[0030] d. Drying after spraying, the drying temperature is 220°C;

[0031] e. Put the graphite parts that have been sprayed twice into a vacuum furnace for roasting, heat up and roast for 3 hours to 1600°C, and roast at this temperature for 1 hour, and finally cool down for 6 hours to 300°C to start the furnace.

Embodiment 3

[0033] The spraying process of the silicon carbide coating solution that is used for graphite surface among the present invention, it adopts following steps:

[0034] a. Take a large-diameter sprayer, put the above solution into it, and spray the surface of the graphite part;

[0035] b. Drying after spraying, the drying temperature is 200°C;

[0036] c. Then spray on the surface of graphite parts;

[0037] d. Drying after spraying, the drying temperature is 200°C;

[0038] e. Put the graphite parts that have been sprayed twice into a vacuum furnace for roasting, heat up and roast for 3 hours to 1550°C, and roast at this temperature for 1 hour, and finally cool down for 6 hours to 300°C to start the furnace.

[0039] The spraying process of the present invention can coat a layer of non-completely dense silicon carbide coating on the surface of graphite, which can protect the surface of graphite parts to a large extent, reduce the corrosion of silicon vapor, and can be used i...

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PUM

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Abstract

The invention relates to the technical field of graphite surface coatings, in particular to a silicon carbide coating solution used on a graphite surface and a spraying technology thereof. The solution is prepared by evenly mixing four materials comprising industrial silicon powder, graphite powder, graphite glue and a diluent, and is used for the spraying technology on the graphite surface. According to the spraying technology of the invention, the graphite surface is coated with a silicon carbide coating with a non-completely-dense structure, the silicon carbide coating can protect the graphite piece surface to a large extent, can reduce silicon vapor corrosion, can be used on the surfaces of main consumable material parts such as hydrogenation furnace heating rods for polysilicon, heat insulation barrels for monocrystalline silicon, heaters, crucibles and the like, can improve the life of the parts by 40% to 100% without increasing of the costs, and can significantly prolong the service life of the graphite parts.

Description

technical field [0001] The invention relates to the technical field of graphite surface coating, in particular to a silicon carbide coating solution for graphite surface and a spraying process thereof. Background technique [0002] In my country, the development of solar photovoltaic industry has driven the rapid development of silicon material industries such as polycrystalline silicon and monocrystalline silicon. At present, my country's production capacity has accounted for more than 50% of the world. In these industries, high temperature environments are generally involved, so the current main thermal field structure adopts imported isostatic graphite or domestic three-high graphite. Graphite has good high temperature resistance, but the requirements for graphite in the monocrystalline silicon and polycrystalline silicon industries are also increasing, and they are required to have a longer life. cut costs. As a main consumable, the improvement of graphite life can re...

Claims

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Application Information

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IPC IPC(8): C04B41/85C04B26/12
Inventor 吴鸿
Owner SHANGHAI HENGGU NEW MATERIAL SCI & TECHCO LTD
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