Micro contact printing device based on voice coil motors and work process thereof

Abstract

The invention discloses a micro contact printing device based on voice coil motors and a work process of the micro contact printing device. The micro contact printing device comprises a macro dynamic drive device, a micro dynamic leveling drive device, a printing device and an ink supplying device, wherein the macro dynamic drive device can achieve coarse positioning of a moulage and a printing platform in the vertical direction, and the micro dynamic leveling drive device is driven by the four voice coil motors. Firstly, an inclinometer is used for guaranteeing that the printing platform is in a horizontal position. Secondly, an optical component is used for detection, so that the voice coil motors are controlled to work to regulate the degree of parallelism between the moulage and printing materials, and fine leveling is achieved. Finally, the four voice coil motors are driven to work synchronously to carry out contact transfer printing between the moulage and the printing materials. The micro contact printing device is based on a positioning and constant force control method of the voice coil motors, the voice coil motors can be used for achieving the two steps of leveling and micro motion to guarantee uniform contact between the moulage and the printing materials, and high-accuracy, high-efficiency and pollution-free transfer printing can be realized.

Description

technical field [0001] The invention relates to the technical field of micro-contact printing, in particular to a micro-contact printing device based on a voice coil motor and its working process. Background technique [0002] Microcontact printing is a technique that uses an elastic stamp with a relief pattern to form a patterned structure on the surface of a substrate. The stamp is coated with the material used to form the pattern as ink, and then the stamp is in contact with the surface of the substrate to achieve the purpose of transferring the pattern. The size of this molding process belongs to the nanometer level, especially in the ink transfer process, the size and uniformity of the contact force between the stamp and the printing material will cause the stamp to deform to varying degrees. When the deformation exceeds the allowable range, it will It will cause sticking, collapse, bending of graphic part, or collapse of non-graphic part, etc. If the amount of deforma...

AI Technical Summary

Problems solved by technology

This kind of driving method can easily control the contact force between the stamp and the substrate, but the transmission method of this transfer mechanism has time lag and low precision, and is not suitable for nanoscale manufacturing processes

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