A vacuum processing system valve assembly and chemical vapor deposition system

Abstract

The invention discloses a vacuum treatment system valve assembly and a chemical vapor deposition system. The vacuum treatment system valve assembly comprises a partition board provided with transmission through holes and sealing valve mechanisms corresponding to the transmission through holes; each sealing valve mechanism comprises a backboard, a sealing board arranged on the backboard, and an airbag which is located between the backboard and the partition board and is used for controlling sealing of the sealing board on each transmission through hole, and the sealing board is matched with a through hole structure; the airbag operating temperature is higher than 100 DEG C. The vacuum treatment system valve assembly controls opening and closing of the transmission through holes on the partition board and the sealing boards by the airbag so as to realize conduction and sealing of two sides of the partition board, and improves the sealing and conduction effects of the two sides of the partition board; and besides, the airbag work temperature is higher than 100 DEG C, so that the working stability of the vacuum treatment system valve assembly is improved, and even under a condition of high temperature, stability of a thin film deposition technological process is not affected.

Description

technical field [0001] The invention relates to a vacuum isolation assembly, in particular to a vacuum processing system valve assembly and a chemical vapor deposition system. Background technique [0002] Solar photovoltaic power generation refers to the power generation technology that uses the photovoltaic effect to convert light energy into electrical energy. The energy of sunlight is inexhaustible and inexhaustible, and it is the most important energy source for sustainable development. In particular, the second-generation thin-film solar cells have become a research and development hotspot in recent years due to a series of advantages such as low energy consumption and environmental protection. [0003] The structure of a thin film solar cell generally includes a substrate, a transparent electrode, a p-type doped silicon film, an i layer (non-doped or intrinsic silicon film), an n-type doped silicon film, a back electrode and a protective plate. Among them, p-type dop...

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Problems solved by technology

[0009] In view of the existing thin film deposition technology, the structure of the sealing valve between the processing chamber and the transmission chamber is complicated, the sealing and conduction process of the processing chamber and the transmission chamber are cumbersome, and thus the sealing between the processing chamber and the transmission chamber and the conduction control are difficult, etc. Defects, the present invention provides a vacuum processing system valve assembly and a chemical vapor deposition system, a sealing plate is set on the transmission through hole of the partition between the two isolation chambers, and the air bag is used to realize the gap between the sealing plate and the transmission through hole Opening and closing, so as to realize the conduction and sealing between the two isolated chambers

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