Wafer Transfer System

Abstract

The present invention discloses a wafer transport system, which is suitable for transporting multiple wafers from a wafer cassette. The wafer transfer system includes a positioning fixture, a feeding mechanism, a carrying unit and a pick-and-place unit. The positioning fixture has a plurality of receiving slots corresponding to the wafers, and the loading mechanism is adapted to simultaneously load the plurality of wafers in the wafer box into the positioning fixture along a first direction on a plane. Holding tank. The carrying unit includes a rotating disk, and a plurality of carrying parts are provided on the rotating disk. The rotating disk is adapted to rotate along an axial direction of the vertical plane, so that the plurality of bearing parts pass through a discharge position in sequence, wherein the discharge position and the projection of the positioning fixture on the plane are arranged along the first direction. The pick-and-place unit is used to transfer the wafers in the positioning fixture to the carrying part located at the discharge position respectively and sequentially.

Description

Technical field [0001] The invention relates to a wafer transfer system. Background technique [0002] With the increasing integration of semiconductor elements of integrated circuits, the accuracy of the manufacturing process and production efficiency are relatively important. A slight error in the semiconductor manufacturing process may lead to failure of the manufacturing process and damage to the wafer, thus costing a lot of costs. [0003] However, the structure and movement of the known wafer transfer system are quite complicated, and a robot arm including rods and bearings must be used to rotate, extend, and retract to transfer the wafer to the position, which limits the production efficiency. However, the frequent use of the mechanical arm will often cause the material of the transmission element to age, wear and even deform, resulting in the generation of material particles and the fall of dust, which become a source of pollution. In the process of transferring the wafer...

AI Technical Summary

Problems solved by technology

[0004] In addition, after a long-term use of the wafer transfer system, the materials of the above-mentioned transmission components are aging and worn more and more seriously. Therefore, when the machine has been running for a period of time, it must be shut down to replace the aging and worn components, resulting in time and cost. Waste, affecting production process yield

Images