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A kind of magnetic recording film structure and preparation method thereof

A thin-film structure, magnetic recording technology, applied in chemical instruments and methods, record carrier manufacturing, layered products, etc., can solve the problems of difficult ignition and deposition, cannot guarantee film deposition, etc., and achieve excellent structural performance and thermal stability. high effect

Active Publication Date: 2017-01-25
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, during the deposition process of magnetron sputtering, it was found that the Fe target and Co target are not easy to start and deposit in the DC sputtering mode. For thin film deposition, it is necessary to prepare FePt composite target to obtain good deposition effect

Method used

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  • A kind of magnetic recording film structure and preparation method thereof
  • A kind of magnetic recording film structure and preparation method thereof
  • A kind of magnetic recording film structure and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] (1) Put the glass substrate, Fe target and Pt sheet in acetone and alcohol in sequence, clean them with ultrasonic waves for 10 minutes, dry them with a hair dryer, and place them in the position of the substrate and target in the instrument cavity;

[0025] (2) Close the instrument chamber door for vacuuming;

[0026] (3) The instrument is evacuated to -4 After Pa, heat the substrate to 200°C;

[0027] (4) After passing argon gas to about 1Pa, deposit the Fe / Pt multilayer film in the following order: Fe layer for 30 minutes, Pt layer for 30 minutes, Fe layer for 30 minutes, Pt layer for 30 minutes, Fe layer for 30 minutes, and Fe layer for 30 minutes Pt layer, 30min Fe layer, 30min Pt layer, that is, glass substrate / (Fe / Pt) 4 film structure;

[0028] (5) Cut the deposited thin film into small rectangular squares of about 8mm×5mm with a glass cutter and put them into the quartz tube, and vacuumize the quartz tube. Firstly use a mechanical pump to rough pump to below ...

Embodiment 2

[0032] (1) Put the glass substrate, Fe target and Pt sheet in acetone and alcohol in sequence, clean them with ultrasonic waves for 10 minutes, dry them with a hair dryer, and place them in the position of the substrate and target in the instrument cavity;

[0033] (2) Close the instrument chamber door for vacuuming;

[0034] (3) The instrument is evacuated to -4 After Pa, heat the substrate to 200°C;

[0035] (4) After passing argon gas to about 1Pa, deposit the Fe / Pt multilayer film in the following order: Fe layer for 30 minutes, Pt layer for 30 minutes, Fe layer for 30 minutes, Pt layer for 30 minutes, Fe layer for 30 minutes, and Fe layer for 30 minutes Pt layer, 30min Fe layer, 30min Pt layer, that is, glass substrate / (Fe / Pt) 4 film structure;

[0036] (5) Cut the deposited thin film into small rectangular squares of about 8mm×5mm with a glass cutter and put them into the quartz tube, and vacuumize the quartz tube. Firstly use a mechanical pump to rough pump to below ...

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Abstract

The invention discloses a magnetic recording film structure. Four Fe layers and Four Pt layers are alternately deposited on a glass substrate, namely a glass substrate / (Fe / Pt)4 structure is adopted. Coercive forces in directions parallel to and perpendicular to the film surface are both up to 12.5kOe. The invention further discloses a production method of the magnetic recording film structure. The magnetic recording film structure has excellent performance and high thermal stability.

Description

technical field [0001] The invention relates to the technical fields of magnetic recording, information storage and reproduction information recording, etc., in particular to a method for preparing a magnetic recording thin film with a multilayer film structure by a laser pulse deposition method. Background technique [0002] With the rapid development of the information industry, the volume of the recording medium for storing information is getting smaller and higher, and the density is getting higher and higher. However, as the magnetic recording density increases, the volume of the magnetic medium corresponding to each recording bit becomes smaller. When the grain size of the magnetic recording medium is small to a certain extent, thermal stability problems will occur and cause the recording bit to self-demagnetize. , resulting in the failure of the recorded information, that is, the superparamagnetic phenomenon. Therefore, in order to maintain the thermal stability of r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B5/84C23C14/34B32B17/06B32B15/04
Inventor 吴琼张朋越王洁依葛洪良
Owner CHINA JILIANG UNIV