Optical exposure equipment, exposure method adopted by optical exposure equipment and display device production system

Abstract

The invention provides optical exposure equipment, an exposure method adopted by the optical exposure equipment and a display device production system. The optical exposure equipment comprises an optical exposure mechanism and an exposure region for a substrate to be oriented; the optical exposure mechanism comprises an exposure unit and a stepping unit for driving the exposure unit to move; the exposure unit is used for carrying out exposure on the substrate to be oriented; the exposure unit comprises a plurality of light sources which are uniformly arranged at intervals; the stepping unit is used for driving the exposure unit to move; the movement direction of the exposure unit is the same as the arrangement direction of the light sources. According to the optical exposure equipment, by the arrangement of the stepping unit, the exposure unit can move to an illumination intensity relatively-weak region along with the stepping unit and meanwhile, the exposure unit can still have uniform illumination intensity after moving, so that the exposure unit is more uniform in carrying out optical exposure in the whole exposure process to further avoid causing defectiveness of an orientation film on the surface of the substrate to be oriented due to poor optical exposure uniformity, and thus, the quality of a display panel adopting the oriented substrate is further ensured.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an optical alignment device, an alignment method thereof, and a display device production system. Background technique [0002] A liquid crystal display panel is usually formed by combining an upper substrate and a lower substrate, and liquid crystals are filled in the gap formed by combining the upper substrate and the lower substrate. Wherein: the upper substrate includes an upper glass substrate, a polarizing plate and three primary color filters for realizing colorization of images. The lower substrate includes a lower glass substrate, a conductive glass microplate, semiconductor switching devices and vertical and horizontal lines connecting the semiconductor switching devices, and is used to control the deflection of liquid crystal molecules. In order to ensure the alignment direction of the liquid crystal molecules in the initial state, an alignment film is usuall...

AI Technical Summary

Problems solved by technology

Due to the limitation of the manufacturing process of the long lamp tube 11, it is difficult to control the illumination uniformity of the long lamp tube 11 in the effective light-emitting area, and the longer the lamp tube, the worse the illumination uniformity, and the adjustment flexibility of the illumination uniformity It is also poor, which has great limitations in the application of photo-alignment technology for large-generation LCD panels

Simultaneously, because the long high-pressure mercury lamp tube 11 is made of quartz material, the lamp tube of this material is fragile, and the longer the lamp tube length, the higher the manufacturing cost and the more expensive the price, which will inevitably increase the production cost.

In addition, with the development of photosensitive alignment film materials, low-illuminance materials are increasingly becoming a development trend. When forming alignment films, they require low exposure energy, short alignment process time, and large production capacity. They have advantages in actual production. However, the light intensity of the long lamp tube 11 is generally high, and when the required exposure energy is low, the long lamp tube 11 is often unable to cope with

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