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A kind of tft array substrate and its manufacturing method, display device

A technology of an array substrate and a manufacturing method, which is applied in the display field and can solve problems such as low production efficiency, complicated manufacturing and processing procedures, and reduced product quality

Active Publication Date: 2017-07-18
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this way, in the production process, due to the multiple coating or deposition processes, the production and processing procedures are complicated, resulting in low production efficiency and increased production costs.
And the use of multiple patterning processes will lead to the superposition of processing errors, thereby reducing product quality

Method used

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  • A kind of tft array substrate and its manufacturing method, display device
  • A kind of tft array substrate and its manufacturing method, display device
  • A kind of tft array substrate and its manufacturing method, display device

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Embodiment Construction

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0028] An embodiment of the present invention provides a method for manufacturing a TFT array substrate, such as image 3 , Figure 4 shown, including:

[0029] S101 , forming a first metal layer 03 on the surface of the substrate 01 . Wherein, the substrate 01 is a transparent substrate, which can be made of transparent glass or transparent resin material.

[0030] S102 , forming a semiconductor layer 16 on the surface of the first metal layer 03 through s...

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Abstract

Embodiments of the present invention provide a TFT array substrate, a manufacturing method thereof, and a display device, and relate to the field of display technology. The manufacturing process of the vertical structure TFT can be simplified, and the number of patterning processes used can be reduced. The array substrate includes a pattern of drain electrodes formed on the surface of the substrate, a pattern of a semiconductor active layer is formed on the surface of the pattern of the drain electrode through semiconducting treatment, and a pattern of active electrodes is formed on the surface of the pattern of the semiconductor active layer, The patterns of the drain electrode, the semiconductor active layer, and the source electrode are formed through one patterning process.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a TFT array substrate, a manufacturing method thereof, and a display device. Background technique [0002] With the rapid development of display technology, TFT-LCD (Thin Film Transistor Liquid Crystal Display, Thin Film Transistor Liquid Crystal Display), as a flat panel display device, has the characteristics of small size, low power consumption, no radiation and relatively low production cost. , and are increasingly being used in the field of high-performance display. [0003] TFT-LCD consists of an array substrate and a color filter substrate. The array substrate of TFT-LCD in the prior art usually consists of a plurality of pixel structures arranged in a matrix, and its typical structure is as follows figure 1 As shown, a plurality of pixel units 12 are divided by gate lines 10 and data lines 11 crossing horizontally and vertically, and thin film transistors (TFTs) are ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/84H01L21/28H01L21/336H01L27/12H01L29/417H01L29/786G02F1/1362G02F1/1368
CPCH01L29/78642H01L27/1288H01L29/7869
Inventor 孔祥春曹占锋
Owner BOE TECH GRP CO LTD