TVS device and manufacturing method
A manufacturing method and device technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as signal attenuation
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[0039] The structure of the TVS device of the present invention is as Figure 9 As shown, there is a heavily doped P-type buried layer on the P-type low-resistance substrate, and there are three isolation regions on the P-type buried layer, which isolate the first isolation well and the second isolation well.
[0040] In the first isolation well, there are heavily doped N-type buried layers from bottom to top, the N-type buried layer is in contact with the P-type buried layer on the P-type substrate, and above the N-type buried layer is an N-type buried layer. The epitaxial layer, the N-type epitaxial layer is in the shape of a convex shape with a thin top and a thick bottom, and the two shoulders are two grooves, and the two grooves are filled with intrinsic polysilicon and heavily doped P-type polysilicon from bottom to top. lead out the buried electrode.
[0041] In the second isolation well, there is a P-type epitaxial layer from bottom to top, the P-type epitaxial layer ...
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