Nitride semiconductor device
A nitride semiconductor, wiring layer technology, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve the problems of increased on-resistance, inability to obtain, and inability to sufficiently reduce on-resistance , to achieve the effect of reducing wiring resistance, high maximum current, and increasing the number of wiring
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[0040] refer to Figure 1 ~ Figure 4 A nitride semiconductor device according to an embodiment of the present invention will be described.
[0041] like figure 1 as well as figure 2 As shown, in the nitride semiconductor device according to this embodiment, the buffer layer 2 and the nitride semiconductor layer 3 are sequentially formed on the substrate 1 made of silicon (Si). The nitride semiconductor layer 3 is composed of an undoped gallium nitride (GaN) layer 4 having a thickness of approximately 2.5 μm, and an undoped aluminum gallium nitride (AlGaN) layer 5 having a thickness of approximately 50 nm formed thereon. Two-dimensional electron gas (2DEG) is generated in the interface region between the undoped GaN layer 4 and the undoped AlGaN layer 5, and the 2DEG functions as a channel region.
[0042] On the nitride semiconductor layer 3 , source electrodes 7 a as first electrodes and drain electrodes 7 b as second electrodes are separated from each other and alternate...
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