A silicon micro-electrostatic levitation accelerometer
A technology of electrostatic levitation and accelerometer, which is applied in the direction of measuring acceleration, velocity/acceleration/impact measurement, measuring devices, etc. It can solve the problems of limiting the resolution and accuracy level of accelerometers, large measurement and control circuits, and poor engineering practicability, etc., to achieve Reduction of installation error and its influence by stress and temperature, improvement of resolution, effect of high stability characteristics
Active Publication Date: 2015-11-25
BEIJING INST OF AEROSPACE CONTROL DEVICES
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Problems solved by technology
In the current research, the finished meter head is directly installed on the PCB circuit board for testing. Factors such as stress deformation and temperature creep of the PCB circuit board itself lead to large installation errors, which directly limit the resolution of the accelerometer. and precision level
In addition, the measurement and control circuit supporting the micro-static levitation accelerometer has large volume, high power consumption, and poor engineering practicability
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[0019] Such as figure 1 As shown, the present invention includes a measurement and control system, a metal base 14 and a gauge head. The measurement and control system consists of four layers of circuits stacked vertically. The four-layer circuit includes a digital control board 23 , an analog-digital-digital-analog interface board 22 , a main body detection board 21 and a front detection board 16 from top to bottom. The four-layer circuits are sequentially connected with the data and logic flexible circuit 17, the front displacement detection signal flexible circuit 18, and the main body displacement detection signal flexible circuit 19. The circuit 15 is connected, and the flexible circuit should have a good electromagnetic shielding function. In order to control the overall volume, the volume of each circuit board is less than 5cm3. A measurement and control system interface 24 is installed on the digital control board 23 for ±12V power input, RS422 digital output and in...
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The invention provides a silicon micro electrostatically suspended accelerometer, and relates to an MEMS micro inertia component and an instrument. The silicon micro electrostatically suspended accelerometer comprises a measurement and control system, a metal base and a gauge outfit, wherein the measurement and control system comprises four layers of circuits vertically stacked, the four layers of the circuits sequentially comprise a digital control board, an analog-digital and digital-analog interface board, a main detection board and a front detection board, the gauge outfit is welded to the front detection board, the metal base is provided with an installation hole and an installation boss, the digital control board, the analog-digital and digital-analog interface board and the main detection board are sequentially connected and fixed to the installation hole of the metal base, and the front detection board is fixed to the installation boss of the metal base. The silicon micro electrostatically suspended accelerometer is high in resolution ratio, stability of installation errors is good, and the silicon micro electrostatically suspended accelerometer has a local temperature control function and is compact in structure.
Description
technical field [0001] The invention relates to a MEMS micro-inertial device and an instrument, in particular to a micro-static suspension accelerometer. Background technique [0002] The micro-electrostatic levitation accelerometer combines electrostatic levitation with MEMS technology, and uses the inspection quality of six-degree-of-freedom closed-loop levitation to detect three-axis acceleration. It has the characteristics of low cost, small size, light weight, high potential resolution, and multi-axis integration. It has unique application value in drag-free control of micro-satellites, space-borne gravity measurement, seismic exploration of mineral resources, and high-precision level detection. [0003] The non-silicon MEMS technology is used to manufacture the six-degree-of-freedom micro-static levitation accelerometer. The radial electrode with a thickness of nearly 100um needs to use SU-8 negative glue, but the glue is difficult to remove and often leads to structur...
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IPC IPC(8): G01P15/125
Inventor 马高印韩丰田张龙游鹏程严小军
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES
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