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Mini electric field sensor with double-clamped piezoelectric beams

An electric field sensor, clamped beam technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, electrostatic field measurement, etc. It is suitable for problems such as batch manufacturing and large sensor volume, and achieves the effect of convenient control, simple structure and small volume

Active Publication Date: 2014-03-26
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the MEMS electric field sensor mentioned above, the piezoelectric ceramic strip has a large volume, which makes the sensor bulky and consumes high power.
In addition, the piezoelectric ceramic strips are connected by adhesives, and the manufacturing accuracy is poor, resulting in weak and unstable output signals, which are not suitable for mass production

Method used

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Embodiment Construction

[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0032] It should be noted that, in the drawings or descriptions of the specification, similar or identical parts all use the same figure numbers. Implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art. Additionally, while illustrations of parameters including particular values ​​may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values ​​within acceptable error margins or design constraints. In addition, the directional terms mentioned in the following embodiments, such as "upper", "lower", "front", "rear", "left", "right", etc., are only re...

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Abstract

The invention provides a mini electric field sensor with double-clamped piezoelectric beams. The sensor comprises a pedestal and a sensor sensitive structure, wherein the sensor sensitive structure is formed on the pedestal and includes the multiple double-clamped beams of a grid structure. The sensor of the invention has the advantages of simple structure and small size.

Description

technical field [0001] The invention relates to the field of micro-electromechanical (MEMS) electric field sensors, in particular to a double-terminal fixed-supported piezoelectric beam type miniature electric field sensor. Background technique [0002] Electric field measurement has a wide range of applications in meteorological research, aerospace, power systems and other fields. The electric field sensor is used to measure the electric field to obtain effective information, to ensure the safety of rockets, satellites and other aircraft, and to avoid personal injury and property loss in the fields of meteorology, aerospace, power grids, and industrial production. [0003] The miniature electric field sensor based on micromachining technology has obvious advantages: small mass, which is more conducive to measuring high altitude or outer space; small volume, can be used to measure the details of electric field distribution; in addition, the miniature electric field sensor an...

Claims

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Application Information

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IPC IPC(8): G01R29/12B81B3/00
Inventor 夏善红冯可佟建华方东明
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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