Prop drawing-shaped micro-mechanical solid fluctuating modal matching gyroscope

Abstract

The invention provides a prop drawing-shaped micro-mechanical solid fluctuating modal matching gyroscope which comprises a prop drawing-shaped harmonic oscillator with four cube bulges at the four corners of the top end, four driving electrodes which are distributed above or nearby the cube bulges on the top end of the harmonic oscillator along the side face of the harmonic oscillator, and four detecting electrodes which are distributed above or nearby the cube bulges on the top end of the harmonic oscillator along the side face of the harmonic oscillator, wherein the spatial positions of the four driving electrodes are perpendicular to those of the four detecting electrodes. The gyroscope works by the means that the driving modality and the detecting modality of the prop drawing-shaped harmonic oscillator are matched with each other; the alternating voltage is applied onto the two driving electrodes on the prop drawing-shaped harmonic oscillator, and the inverse piezoelectric effect or the capacitive sensing effect enables the prop drawing-shaped harmonic oscillator to vibrate under the driving modality; in the case that an input angular velocity exists, the vibration model of the prop drawing-shaped harmonic oscillator is converted into the detecting modality, and sensitive signals generated by the piezoelectric positive effect or the capacitive sensing effect of the detecting electrodes are processed by a peripheral circuit to obtain input angular velocity signals.

Description

Technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, and in particular to a cylindrical micro-machined solid wave mode matching gyroscope. Background technique [0002] A gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier. It plays a very important role in the fields of attitude control and navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Micro-gyros based on MEMS technology are processed by micro-nano batch manufacturing technology, and their cost, size, and power consumption are very low, and environmental adaptability, working life, reliability, and i...

AI Technical Summary

Problems solved by technology

[0005] This technology has the following disadvantages: the structure of the micro-gyro resonator of the spring mass system is fragile, which limits its application in many shock-resistant conditions; the processing technology of the gyro is relatively complicated, the processing cost is high, and it is not suitable for mass production; The frequency split between the gyro drive mode and the detection mode is large, resulting in a large bandwidth of the gyro, and it is difficult to improve the quality factor; the noise of the gyro is large, and the generated signal is small, which is not easy to improve the accuracy of detection

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