An optomechanical crystal microcavity based on nanobeam structure

Abstract

The invention provides a calendar crystal microcavity based on a nano beam structure. The calendar crystal microcavity comprises a silicon substrate, a silicon dioxide isolation layer, a silicon slab, a top silicon dioxide layer and an air isolation area. The silicon substrate is used for bearing the whole calendar crystal microcavity. The silicon dioxide isolation layer is used for isolating the silicon substrate from the silicon slab. The silicon slab is arranged on the silicon dioxide isolation layer, and comprises an input waveguide area, a calendar crystal microcavity area and an output waveguide area, the input waveguide area, the calendar crystal microcavity area and the output waveguide area are arranged in sequence, the input waveguide area is used for receiving optical signals and transmitting the optical signals to the calendar crystal microcavity area, and the calendar crystal microcavity area comprises silicon waveguide and an air hole array, and is used for a local photon and phonon defect mode to achieve the coupling of photons and phonons. The output waveguide area is used for outputting the optical signals. The top silicon dioxide layer is arranged on the silicon slab and is matched with the silicon dioxide isolation layer to protect the silicon slab. The air isolation area is arranged above and below the calendar crystal microcavity area, and arranged between the silicon dioxide isolation layer and the top silicon dioxide layer.

Description

technical field [0001] The invention relates to the technical field of silicon-based micro-nano photonic devices, in particular to an optomechanical crystal microcavity based on a nanobeam structure. Background technique [0002] In the context of major breakthroughs in mesoscopic physics and quantum fields in the new century, cavity optomechanics based on optomechanical crystal microcavities has become a new research direction that has attracted attention rapidly in recent years. Cavity optomechanics studies the interaction between photons and mechanical vibrations, and phonons are the quantized description of mechanical vibrations in material lattices. Therefore, cavity optomechanics enables people to extend the manipulation of quantum states to quasi-particles—phonons. Compared with the quantum manipulation of elementary particles, the manipulation of quasiparticle phonons represents the highest level of quantum state manipulation. It can be predicted that the use of cav...

AI Technical Summary

Problems solved by technology

[0003] Although the study of cavity optomechanics has shown an extremely bright research prospect, there are still many physical and technical difficulties to be explored in the related research progress.

Images