A needle-tip discharge device for ablation of solid surface

Abstract

The invention discloses a needle tip discharge device for solid surface denudation, and belongs to the technical field of element analysis in a solid sample. The needle tip discharge device comprises a high voltage power supply, a needle body support platform, a needle body, a sample table, a cavity and a working gas, wherein electrodes of the high voltage power supply are respectively connected with the needle body and the sample table, the needle body support platform is arranged at the upper part of the cavity and hermetically connected with the cavity, the sample table is arranged at the lower part of the cavity and hermetically connected with the cavity, the needle body passes through the needle body support platform and then extends into the cavity, the needle tip of the needle body faces a surface of the sample table, a sealed chamber is arranged inside the cavity, an inlet and an outlet of the working gas are arranged in the cavity, and the working gas is located in a sealed chamber of the cavity. Discharge can be realized within an air pressure range from high vacuum to normal pressure; a surface of the solid sample can be directly eroded, generated particles can be transmitted to other excitation sources, and formed plasmas also can be used as the excitation source or ion sources directly. The needle tip discharge device can be used for eroding a solid surface within the pressure range of 1*10<-6> to 1*10<6> Pa.

Description

technical field [0001] The invention belongs to the technical field of elemental analysis in solid samples, and relates to a needle point discharge device used for solid surface erosion. Background technique [0002] The analysis of elements in solid samples plays an extremely important role in the fields of electronics, metallurgy and semiconductor industries. Solid sample analysis includes solution method and solid direct analysis method. Compared with the solution method, the solid direct analysis method can save a lot of sample preparation time, and is especially suitable for solid samples that are difficult to dissolve or contain strong toxicity. At present, the methods used for direct sampling of solids are mainly laser method and discharge method. Laser method has its unique advantages as an ablation method or excitation (ionization) method, but the cost is too high. Compared with the laser method, the discharge method has simple equipment and low cost. [0003] Dis...

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Problems solved by technology

For a pressure range of 1 x 10 -6 ~1×10 6 Pa, pinpoint discharge device applied to elemental analysis in solid samples, has not been reported yet

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