Integrated electro-microfluidic probe card, system and method of use thereof
A technology of microfluidics and probe cards, applied in chemical instruments and methods, circuits, measurement electronics, etc., can solve problems such as increasing manufacturing and/or operational challenges
Active Publication Date: 2017-04-12
TAIWAN SEMICON MFG CO LTD
View PDF5 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Despite the advantages of BioFETs in many respects, their fabrication and / or operation are more challenging, e.g. due to compatibility issues between semiconductor fabrication processes and biological applications
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0029] It should be understood that the following disclosure provides many different embodiments or examples for implementing different features of the invention. Specific examples of components and arrangements are described below to simplify the present disclosure. Of course, these are examples only and are not intended to be limiting. Furthermore, in the following description, the first part is formed over or on the second part, may include an embodiment in which the first and second parts are formed to be in direct contact, and may also include an embodiment in which the first and second parts are formed to be interposed. An embodiment in which an additional part is placed between the parts so that the first and second parts are not in direct contact. Furthermore, references to relative terms such as "top," "front," "bottom," and "rear" are used to provide relative relationships between elements and are not intended to illustrate any absolute orientation. Various feature...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The present invention provides a testing and processing method, system and device for a biofield effect transistor (BioFET) device. Wafer-level biosensor processing tools include wafer stages, integrated electro-microfluidic probe cards, and fluid suppliers and reflowers. The integrated electro-microfluidic probe card includes a fluidic base (which may be transparent), a microfluidic channel in the fluidic base, at least one microfluidic probe and a plurality of electrical probes located at the bottom of the fluidic base The top end, fluid and electrical input and output ports on the sides of the fluidic base, and at least one operating flange on the fluidic base. The method includes aligning the wafer, mounting the integrated electro-microfluidic probe card, flowing a test fluid, and testing electrical performance. The tool can also be used to identify or mark fluids in device regions on the wafer. The invention also provides an integrated electric microfluidic probe card, system and using method thereof.
Description
technical field [0001] The present invention relates to methods of forming and testing biosensors on a chip. In particular, the present invention relates to systems and methods for testing biofield effect transistors (bioFETs) and methods of forming them. Background technique [0002] Biosensors are devices for sensing and detecting biomolecules and operate based on electronic, electrochemical, optical and mechanical detection principles. Biosensors including transistors are sensors that detect electrical charges, photons, and mechanical properties of biological entities or biomolecules. Detection can be accomplished by detecting the bioentity or biomolecule itself or by an interaction or reaction between a specified reactant and the bioentity / biomolecule. Such biosensors can be fabricated using semiconductor processes, can quickly convert biomolecular information into electrical signals, and can be easily applied to integrated circuits (ICs) and microelectromechanical sys...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/00B81C1/00G01R1/073
CPCB01L3/502707B01L9/527B01L2200/025B01L2200/027B01L2200/143Y10T29/49G01N27/4145G01N21/75G01N33/5438G01N27/3271B01L2200/10B01L2300/0645G01N27/3275
Inventor 刘怡劭赖飞龙郑创仁郑钧文
Owner TAIWAN SEMICON MFG CO LTD