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Composite soft magnetic material thin film based on sendust soft magnetic material and preparation method thereof

A technology of composite soft magnetic and soft magnetic materials, which is applied in the direction of magnetic materials, inorganic material magnetism, and the application of magnetic films to substrates. It can solve the problems of high processing costs and long time-consuming sputtering molding processes, and reduce processing costs. , enhance process compatibility, and improve the performance of magnetic thin films

Inactive Publication Date: 2016-08-17
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

The sputtering process is time consuming and expensive to process

Method used

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  • Composite soft magnetic material thin film based on sendust soft magnetic material and preparation method thereof

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Embodiment Construction

[0021] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

[0022] Such as figure 1 As shown, this embodiment includes: small sendust soft magnetic powder particles 1 , large sendust soft magnetic powder particles 2 , manganese zinc ferrite soft magnetic powder particles 3 , and silica hardened network structure 4 . Manganese zinc ferrite soft magnetic powder particles 3 are used as an insulating agent to coat the surfaces of sendust soft magnetic powder particles 1 and 2, and the particles are bonded by a hardened network structure 4 of silicon dioxide. The gaps between the large sendust soft magnetic powder particles 2 are mainly filled by the sendust soft magnetic powde...

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Abstract

The invention provides a composite soft magnetic material thin film based on Fe-Si-Al soft magnetic materials and a manufacturing method of the composite soft magnetic material thin film. The thin film comprises Fe-Si-Al soft magnetic powder particles, a silicon dioxide hardened network structure formed by dehydrating water glass and manganese zinc ferrite soft magnetic powder particles, the Fe-Si-Al soft magnetic powder particles are coated with the manganese zinc ferrite soft magnetic powder particles, the particles are bonded through the silicon dioxide hardened network structure formed by dehydrating the water glass, and mechanical strength is formed. The manufacturing method of the thin film comprises the steps of pretreatment on Fe-Si-Al soft magnetic powder of thin film base materials, insulation coating on the thin film base materials with manganese zinc ferrite soft magnetic powder and low-temperature solidification forming with adhesives of the water glass. Manganese zinc ferrite is used as insulating agents, the high-frequency magnetic performance of the composite soft magnetic material thin film can be regulated, and the upper limit of working frequency is improved; good bonding power is achieved. The thin film saves energy, and is environmentally friendly and good in process compatibility, and the composite soft magnetic material thin film with excellent comprehensive magnetic performance can be obtained.

Description

technical field [0001] The invention relates to a composite soft magnetic material thin film, in particular to a composite soft magnetic material thin film based on sendust soft magnetic material and a preparation method thereof for low-temperature molding. Background technique [0002] In the integration of MEMS devices, magnetic materials and thin films need to be used to realize the conversion, transmission and storage of energy and signals. The miniaturization and high frequency of electronic components have put forward higher standards and requirements for magnetic materials and thin films. This also means that magnetic materials and thin films must have low loss and good frequency stability in order to adapt to applications under high frequency conditions. Especially in the manufacture of high-frequency micro-inductors, in order to obtain sufficient inductance, micro-inductors use magnetic films. Traditional processing techniques for magnetic thin films include scree...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F10/12H01F10/20H01F1/147H01F1/36H01F41/14B22F1/02
Inventor 丁桂甫谢辅强
Owner SHANGHAI JIAO TONG UNIV
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