Surface pretreatment device for polycrystalline silicon ingot and treatment method thereof

Abstract

The invention discloses a surface pretreatment device for a polycrystalline silicon ingot and a treatment method thereof. The problems of serious environmental dust pollution, and low surface cleaning quality and efficiency in the prior art are solved. The surface pretreatment device comprises a corrosion pool (5), an ultrasonic soaking pool (7) and a rinse spray pool (8) sequentially arranged on a pretreatment pool bracket (4), wherein a drainage pipeline (14) is arranged at the center of the bottom surface of a rectangular corrosion pool body (9) of the corrosion pool (5); a drainage control valve (15) is arranged on the drainage pipeline (14); pool bottom grooves (10) are arranged at the bottoms on the left side and the right side of the rectangular corrosion pool body (9); an electric heater (11) is arranged in each pool bottom groove (10); and an acid liquor input pipe (12), an alkali liquor input pipe (13), a purified water input pipe (17) and a compressed air input pipe (18) are respectively arranged on the inner lateral wall of the rectangular corrosion pool body (9). The extracting quality of the silicon ingot and the reuse rate of rim charge are improved.

Description

technical field [0001] The invention relates to a silicon ingot surface cleaning device, in particular to an automatic pre-cleaning device and a processing method for the polluted surface of a polycrystalline silicon ingot. Background technique [0002] During the process of polysilicon ingot casting, impurities such as silicon nitride will stick to the surface of the polysilicon ingot. Due to the segregation and diffusion in the ingot production, some impurities will even penetrate into the surface layer of the polysilicon ingot surface, affecting the subsequent silicon Prescribing of ingots also reduces the recycling rate of leftovers after prescribing. Therefore, before prescribing, the surface of the silicon material should be cleaned to remove the impurities contained in the surface and the surface layer. The prior art uses sandblasting or manual grinding for pretreatment, which has the problems of high work intensity, serious environmental dust pollution, and low clea...

AI Technical Summary

Problems solved by technology

[0003] The invention provides a polycrystalline silicon ingot surface pretreatment device and its treatment method, which solves the technical problems of serious environmental dust pollution and low surface cleaning quality and efficiency in the prior art

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