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A direct-drive grating ruler automatic detection device

An automatic detection device and grating ruler technology, which is applied to measuring devices, optical devices, instruments, etc., can solve the problems of low driving efficiency, low driving speed, and inability to detect the performance of grating rulers.

Active Publication Date: 2016-10-05
JIAXING HUALING MECHATRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to manual driving, the driving efficiency is low, and the driving speed is small, so it is impossible to detect the performance of the measured grating scale under high acceleration and deceleration

Method used

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  • A direct-drive grating ruler automatic detection device
  • A direct-drive grating ruler automatic detection device
  • A direct-drive grating ruler automatic detection device

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0017] specific implementation plan

[0018] Specific embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0019] Four vibration-damping feet 12 can adjust the level of the device, and the vibration-damping feet 12 also play the role of isolating the vibration and noise interference of the environment.

[0020] The linear motor I3 and the linear motor II14 are used as power sources to provide a wide range of test speed and acceleration for the drive platform and the read head 13 of the measured grating ruler. The main drag chain 2 plays the role of pulling and protecting the power supply cables of the linear motor I3 and the linear motor II14.

[0021] Linear motor Ⅰ3 and linear motor Ⅱ 14 drive the workbench 7 to move along the guide rail 6, and the workbench 7 drives the read head 13 of the measured grating ruler to reciprocate. When the read head 13 of the measured grating ruler moves relative to the measured grating...

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PUM

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Abstract

An automatic detection device for a direct driving grating ruler belongs to the technical field of grating ruler detection and mainly comprises a damping platform, a driving platform and a clamp; the damping platform eliminates the vibration disturbance of the environment; a linear motor is used as a power source for the driving platform and provides an experiment speed with a wider range and an acceleration for a reading head of the detected grating ruler; a high-precision displacement sensor detects the precise displacement information of the reading head of the detected grating ruler in real time and provides more accurate comparison and identification for the displacement information detected by the reading head of the detected grating ruler; the clamp is used for clamping detected grating ruler belts with different length levels. The device is used for detecting the detected grating rulers with different length levels, and the cost of the grating ruler detection device is reduced. The linear motor fast responds, is high in automation level, and wide in experiment speed and acceleration range, so the detection efficiency of the grating ruler is improved.

Description

technical field [0001] The invention belongs to the technical field of grating ruler detection, and in particular relates to an automatic detection device for a grating ruler driven by a linear motor. Background technique [0002] Grating rulers are the core optical components in engineering systems such as optical systems and scientific instruments such as large astronomical telescopes, inertial confinement fusion laser ignition systems, and lithography systems. The resolution, repeatability and accuracy of high acceleration and deceleration of the grating ruler are the key performance indicators of the grating ruler. In order to detect the pass rate index of grating scale products produced in batches, custom-made equipment must be used to test the performance indicators of grating scales one by one. [0003] CN102865816A discloses an automatic detection device for the overall measurement accuracy of a grating ruler, which uses a screw rod to control the movement of the re...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B11/02
Inventor 伍鹏
Owner JIAXING HUALING MECHATRONICS CO LTD