An extreme ultraviolet pulse generation modulator

A pulse generation and extreme ultraviolet technology, which is applied in the field of wireless communication, can solve the problems of large volume, complex operation, and limited life of extreme ultraviolet light sources, and achieve the effects of avoiding absorption or blocking, small size, and simple control

Active Publication Date: 2016-08-24
NAT SPACE SCI CENT CAS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the disadvantages of the EUV light source in the prior art, such as large volume, complex operation, and limited life, so as to provide an EUV pulse generator modulator with small volume, low power consumption, and high yield

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  • An extreme ultraviolet pulse generation modulator

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Embodiment Construction

[0025] The present invention will be further described now in conjunction with accompanying drawing.

[0026] The wavelength range of the extreme ultraviolet pulsed rays involved in the present invention is 10nm-200nm.

[0027] refer to figure 1 , the extreme ultraviolet pulse generation modulator of the present invention includes: an electron source 1, a control grid 2, a focusing electrode 3 and an anode target 4; wherein, the electron source 1 generates electrons, and the control grid 2 controls the electron source 1 The intensity of the generated electrons is regulated to form an electronic pulse 5; the electric field formed by the focusing electrode 3 focuses the electronic pulse 5 to reduce the area where the electronic pulse 5 is incident on the anode target 4; the anode target 4 is connected to a high voltage power supply, It interacts with the electron pulse 5, thereby accelerating the electron pulse 5, which finally bombards the anode target 4, generating EUV pulsed...

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Abstract

The invention relates to an extreme ultraviolet pulse generation modulator. The extreme ultraviolet pulse generation modulator comprises an electron source, a control grid, a focusing electrode and an anode target. Electrons are generated by the electron source, and the control grid is used for controlling the intensity of the electrons generated by the electron source to form electronic pulses. The electronic pulses are focused by an electric field formed by the focusing electrode, the anode target accelerates the electronic pulses, and the electronic pulses finally bombard the anode target to generate extreme ultraviolet pulse rays, wherein the wavelength range of the extreme ultraviolet pulse rays ranges from 10 nm to 200 nm.

Description

technical field [0001] The invention relates to the field of wireless communication, in particular to an extreme ultraviolet pulse generation modulator. Background technique [0002] The research and application of wireless communication has covered radio waves, microwaves to infrared, visible light, ultraviolet and other electromagnetic waves. Driven by the observation technology of X-ray astronomy, the United States and China are carrying out research on the application of space X-ray communication. In theory, X-ray communication has many advantages such as good directionality, long transmission distance, strong confidentiality, no electromagnetic interference from the space environment, and wide communication frequency bandwidth. However, due to the high photon energy of X-rays, collimated emission and focused collection are extremely difficult. In particular, light weight and small volume collimation or focusing systems are still difficult to break through in the short t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J61/04
Inventor 李保权
Owner NAT SPACE SCI CENT CAS
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