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Cleaning device and method

A cleaning device and cleaning water technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of increased waste liquid treatment costs, reduced productivity, reduced safety, etc., to achieve increased The cost of waste liquid treatment, the maintenance of yield rate, and the effect of water saving yield rate

Active Publication Date: 2016-04-06
KURITA WATER INDUSTRIES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method of sterilizing and cleaning with concentrated chemical solution will cause the following problems: the productivity reduction caused by stopping the cleaning production line, the safety reduction caused by non-routine operations using concentrated chemical solution, and the cost of waste liquid treatment. increase, and the increase in poor flushing after sterilization

Method used

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  • Cleaning device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] in such as figure 1 In the shown glass substrate cleaning apparatus, the cleaning conditions are as follows. In addition, the recovery of the pre-cleaning waste water by the pipe 11 is not performed.

[0035] Pure water supply from piping 5: 20L / min

[0036] Capacity of water tank 7: 400L

[0037] Water delivery rate from water tank 7 to jet cleaning nozzle 3: 100L / min

[0038] Discharge from piping 15: 20L / min

[0039] Cleaning was carried out for 10 days under these conditions, and when the number of bacteria in the water in the water tank 7 became 150 / mL and the number of bacteria in the water discharged from the jet cleaning nozzle 3 was 100 / mL, the supply of pure water was stopped and The pump 9 is stopped, and the water in the water tank 7 is circulated at the ozone water supply device 12 at a flow rate of 100 L / min by the pipes 14 and 13, and the ozone water with an ozone concentration of 1 mg / L is introduced from the pipe 13 towards the water tank 7. In 5 m...

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PUM

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Abstract

Provided are a cleaning device and method that can prevent the propagation of bacteria with a simple means and can improve cleaning efficiency for articles to be cleaned in a cascade type cleaning device. A glass substrate (1) is transported by rollers (2) and cleaned by jet cleaning nozzles (3) and final rinsing nozzles (4). Pure water is supplied to the final rinsing nozzles (4). The cleaning waste water from the final rinsing nozzles (4) is made to flow into a tank (7), and is supplied to the nozzles (3) by a pump (9). If the bacteria count in the tank (7) increases, the water in the tank (7) is circulated and passed to an ozone water supply device (12), ozone water supplied to the tank (7), and disinfection carried out.

Description

technical field [0001] The present invention relates to a cleaning device and method for cleaning objects to be cleaned such as glass substrates with cleaning water, and particularly relates to using the cleaning water used in cleaning on the downstream side of the conveying direction for cleaning on the upstream side of the conveying direction, namely So-called cascade type cleaning device and method. Background technique [0002] In recent years, in order to efficiently manufacture flat panel displays (FPDs) represented by liquid crystal televisions, etc., glass substrates for FPDs have gradually increased in size, and cleaning machines for cleaning glass substrates have also increased in size. In addition, due to the increase in the size of the washing machine, the amount of washing water used for washing has also increased. In washing machines, various water-saving schemes are conceived in order to control manufacturing costs. One of them is to store relatively clean wa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/10C02F1/78G02F1/13G02F1/1333H01L21/304
CPCB08B3/022B08B3/14C03C23/0075H01L21/02041H01L21/67028H01L21/67051C02F1/78
Inventor 床嶋裕人
Owner KURITA WATER INDUSTRIES LTD
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