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Sample Carriers for Electron Microscopy

An electron microscope and sample technology, applied in the preparation of test samples, material analysis using wave/particle radiation, circuits, etc., can solve problems such as 3D reconstruction resolution limitations, and achieve the effect of risk reduction

Active Publication Date: 2016-04-06
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

3D reconstructions are thus limited in resolution (since only mechanically possible wedges of tilted angles result in useful detection signals), especially for those parts of the sample near the grid / sample interface

Method used

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  • Sample Carriers for Electron Microscopy
  • Sample Carriers for Electron Microscopy
  • Sample Carriers for Electron Microscopy

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0042] Figure 1A A top view of the sample carrier according to the present invention is schematically shown.

[0043] Figure 1A A sample carrier 10 including a metal foil 12 is shown. The sample carrier shows 4 teeth 14, each showing one or more sloping edges 16 towards the mounting position. The sample 18 is welded in one of these installation positions. Optionally, the sample carrier shows an identification mark 20 to distinguish one sample carrier from another.

[0044] The welding of the sample can be done by beam induced deposition (BID), more specifically ion beam induced deposition (IBID) or electron beam induced deposition (EBID), but beam induced deposition using, for example, a laser beam can also be used. , And other adhesive (adhesive) processes can be used.

[0045] Figure 1B Show schematically Figure 1A The cross-section of the sample carrier along the line AA'.

[0046] Figure 1B Showing teeth along the sample carrier, Figure 1A The cross section of the line AA...

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PUM

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Abstract

The invention discloses a sample carrier for electron microscopy. The invention relates to a sample carrier (10) for transmission electron microscopy. Shadowing is a problem when using prior art sample carriers, such as half-moon-shaped lattices in combination with detectors that detect, for example, X-rays emitted at large emission angles. Similar problems arise when performing tomography where the sample is rotated over a large angle. The present invention provides a solution to shadowing by forming the lattice portion (16) adjoining the interface between the sample and the lattice as a tapered portion.

Description

technical field [0001] The invention relates to a sample carrier for an electron microscope, the sample carrier comprising a metal foil, the sample carrier comprising at least one mounting position bordering the sides of the metal foil for attaching a sample thereto. [0002] The invention also relates to methods of using such sample carriers. Background technique [0003] Such sample carriers are available from TedPella Corporation, Riding, CA, USA, under the name Lift-Out Grid, see eg http: / / www.tedpella.com / grids_html / 4510half.htm, product number 460- 224. [0004] The known push-out grid resembles a semicircle with a diameter of 3 mm and is formed from molybdenum foil 25-30 μm thick. On the straight side of this semicircle it shows four protruding teeth, the ends of which are intended to be used as mounting locations for samples. The lattice thus reveals multiple installation positions. The lattice is relatively stiff, making the sample carrier resilient to vibration...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/20G01N1/44
CPCH01J37/20G01N23/2204G01N23/2251H01J2237/201H01J2237/26
Inventor F.内德洛夫
Owner FEI CO