A method for detecting the airtightness of polycrystalline ingot furnace equipment

Abstract

The invention discloses a method for detecting the air tightness of a polycrystalline ingot furnace. The method particularly comprises the steps of vacuumizing the furnace chamber to carry out a first vacuum test before the silicon ingot raw materials are charged and the furnace chamber of the polycrystalline ingot furnace apparatus is closed to produce silicon ingots; after the silicon ingots are formed and before the furnace chamber is opened, vacuumizing the furnace chamber to carry out a second vacuum test, wherein whether the first vacuum test is directly carried out or not is determined according to the second vacuum test results of the previous production cycle. According to the method, since the step of the furnace chamber vacuum test is increased in the silicon ingot procedure running production process, the air tightness of the device within the current production cycle is beneficial to be known timely and factors for affecting the air tightness are checked timely to guarantee the production quality of the silicon ingot. Furthermore, the tightness inspection of the device is increased under the premise that no additional production time is brought for the polycrystalline ingot furnace, and thus problems existing in the device can be found and timely maintained before the first vacuum test for the next cycle is carried out.

Description

technical field [0001] The invention relates to the technical field of polysilicon processing, in particular to a method for detecting the airtightness of polysilicon ingot furnace equipment. Background technique [0002] At present, the photovoltaic industry is developing rapidly, and there are various types of polycrystalline ingot furnace equipment. Regardless of the change and adjustment of the ingot casting process, the production process is basically: silicon ingot raw material loading → furnace chamber closing → main furnace body vacuum test → program operation → furnace chamber opening → finished silicon ingot out of the furnace → silicon ingot raw material loading → closing furnace cavity. [0003] The vacuum test of the main furnace body is a key step in testing the airtightness of the equipment and components of the polycrystalline ingot casting furnace, which is affected by the closing and opening of the equipment and components as well as the furnace cavity. B...

AI Technical Summary

Problems solved by technology

[0004] Not only does the inspection need to waste a lot of time, but also the equipment needs to be re-vacuumized after the inspection overcomes the defects of the equipment

This method is not only not conducive to finding the factors that affect the airtightness of the equipment, but also the opening and closing of the furnace cavity will affect the vacuum test time of the main furnace body, which greatly increases the time of the vacuum test and affects the production capacity of the polycrystalline ingot furnace equipment per unit time

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