A kind of method for preparing cocralysi alloy target material
An alloy target and alloy technology, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of easy oxidation of Y element, low melting point, and inability to cast, so as to improve yield rate and quality stability , less slag, good fluidity, and the effect of ensuring the ratio of ingredients
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Embodiment 1
[0014] Example 1 uses Co, Cr, Y, Si with a purity of not less than 99.95% and Al with a purity of not less than 99.9% as raw materials for material preparation. Melting Al-Co master alloy, in which the Al content is 25wt.%-40wt.%, the total amount is 2000g, using a vacuum medium frequency induction furnace, washing the furnace with argon for many times, and then melting under the protection of argon, after the fusion is uniform Cast into ingots for later use, and samples were taken for chemical composition analysis, and the results were within the predetermined composition range. Use an electric arc furnace to melt Cr-Y and Cr-Si master alloys. The Y content is 75wt.%-90wt.%, and the Si content is 45wt.%-55wt.%. Form into a button-shaped ingot for use. According to the proportion of Cr: 21-25wt%, Al: 11-13wt%, Y: 0.4-1.8wt%, Si: 0.05-0.5wt%, and the rest is Co, among which Al, Y, Si all use pre-mixed Master alloy, the total weight of the alloy is 2000g. Put all raw material...
Embodiment 2
[0015] Embodiment 2 Prepare materials according to the proportioning in Embodiment 1, and the total weight of the alloy is 5000g. Al-Co master alloy was re-prepared according to the process in Example 1, the total amount was 5000g, and the result was stable after sampling and analysis. Cr-Y and Cr-Si master alloys were prepared according to the process in Example 1. The remaining Al-Co master alloy in Example 1 was used, and the insufficient one was supplemented by a newly prepared alloy. Melting was carried out according to the same process as in Example 1, and finally the product was obtained, and three different positions were respectively taken for chemical composition analysis, and the results were stable, and the difference from the predetermined ratio was very small.
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