Preparation method of bst/bmn/bst multilayer composite film

Abstract

The invention discloses a preparation method of a BST (barium strontium titanate) / BMN / BST multilayer composite film. A layer of BMN dielectric layer with low loss is additionally arranged between two BST films, so that the dielectric loss of the film can be reduced. The method is characterized by comprising the steps: first preparing precursor sol of BST and BMN, then respectively dropping the precursor sol onto a substrate to prepare a corresponding film, carrying out post-annealing on the film at the temperature of 550 to 750 DEG C to obtain the BST / BMN / BST multilayer composite film. The barium titanate, strontium titanate and titanium dioxide are used as raw materials to substitute partial alcohol salt and tetrabutyl titanate, so that the production cost of the film is reduced. The magnesium carbonate is used for substituting the magnesium nitrate hydrate, so that the chemical proportioning is more precise; by adopting a novel improved sol-gel process, the composite film is excellent in performance, simple in process and wide in application prospect.

Description

technical field [0001] The invention belongs to the field of electronic information materials and components, in particular to a BST / BMN / BST multilayer composite film used for microwave tuning components and a preparation method thereof. Background technique [0002] In recent years, with the rapid development of wireless communication and the diversity of network systems (such as mobile phone network, personal area network (PAN), wireless local area network (WLAN) coexistence), reconfigurable smart devices are required to be compatible with various communication standards. Dielectrically tunable RF capacitors have attracted widespread attention as basic units for smart RF applications in reconfigurable devices due to their high tunability, small size, and low cost; research on them has focused on dielectrically tunable capacitor materials. [0003] Perovskite-structured BST-based materials are the most widely studied class of dielectric tunable dielectric materials. The BS...

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Problems solved by technology

[0005] The preparation methods of dielectric thin films mainly include radio frequency magnetron sputtering (RF-Magnetronsputtering), pulsed laser deposition (PLD), metal organic chemical vapor deposition (MOCVD) and sol-gel method (Sol-Gel); compared with other methods , the preparation of thin films by sol-gel method has the advantages of good uniformity, easy control of stoichiometric ratio, simple equipment, etc., and has been widely used in the preparation of dielectric thin films; at the same time, traditional sol-gel method is used to prepare BST thin films with barium and strontium. Alcoholate or acetate and tetrabutyl titanate are used as raw materials, the cost is high, the chemical properties of raw materials are unstable and difficult to obtain

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